Invention Grant
- Patent Title: Method and apparatus for processing metal bearing gases
- Patent Title (中): 处理金属轴承气体的方法和装置
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Application No.: US12511785Application Date: 2009-07-29
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Publication No.: US08124906B2Publication Date: 2012-02-28
- Inventor: William M. Holber , John A. Smith , Xing Chen , Donald K. Smith
- Applicant: William M. Holber , John A. Smith , Xing Chen , Donald K. Smith
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Proskauer Rose LLP
- Main IPC: B23K10/00
- IPC: B23K10/00
Abstract:
A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.
Public/Granted literature
- US20090288772A1 Method and Apparatus for Processing Metal Bearing Gases Public/Granted day:2009-11-26
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