Invention Grant
US08126255B2 Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions
有权
用于创建晶片持久性数据以及使用持久性数据进行检查相关功能的系统和方法
- Patent Title: Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions
- Patent Title (中): 用于创建晶片持久性数据以及使用持久性数据进行检查相关功能的系统和方法
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Application No.: US12234201Application Date: 2008-09-19
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Publication No.: US08126255B2Publication Date: 2012-02-28
- Inventor: Kris Bhaskar , Chetana Bhaskar , Ashok Kulkarni , Eliezer Rosengaus , Cecelia Campochiaro , Chris Maher , Brian Duffy , Aneesh Khullar , Alpa Kohli , Lalita A. Balasubramanian , Santosh Bhattacharyya , Mohan Mahadevan
- Applicant: Kris Bhaskar , Chetana Bhaskar , Ashok Kulkarni , Eliezer Rosengaus , Cecelia Campochiaro , Chris Maher , Brian Duffy , Aneesh Khullar , Alpa Kohli , Lalita A. Balasubramanian , Santosh Bhattacharyya , Mohan Mahadevan
- Applicant Address: US CA San Jose
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA San Jose
- Agent Ann Marie Mewherter
- Main IPC: G06K9/00
- IPC: G06K9/00
Abstract:
Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.
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