Invention Grant
US08127395B2 Apparatus for isolated bevel edge clean and method for using the same
失效
用于隔离斜边边缘清洁的设备及其使用方法
- Patent Title: Apparatus for isolated bevel edge clean and method for using the same
- Patent Title (中): 用于隔离斜边边缘清洁的设备及其使用方法
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Application No.: US11429574Application Date: 2006-05-05
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Publication No.: US08127395B2Publication Date: 2012-03-06
- Inventor: Hyungsuk Alexander Yoon , Andrew D. Bailey, III , Jason A. Ryder , Mark H. Wilcoxson , Jeffrey G. Gasparitsch , Randy Johnson , Stephan P. Hoffmann
- Applicant: Hyungsuk Alexander Yoon , Andrew D. Bailey, III , Jason A. Ryder , Mark H. Wilcoxson , Jeffrey G. Gasparitsch , Randy Johnson , Stephan P. Hoffmann
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: B08B7/00
- IPC: B08B7/00

Abstract:
An apparatus, system and method for cleaning a substrate edge include a bristle brush unit that cleans bevel polymers deposited on substrate edges using frictional contact in the presence of cleaning chemistry. The bristle brush unit is made up of a plurality of outwardly extending vanes and is mounted on a rotating shaft. An abrasive material is distributed throughout and within the outwardly extending vanes of the bristle brush unit to provide the frictional contact. The bristle brush unit cleans the edge of the substrate by allowing frictional contact of the plurality of abrasive particles with the edge of the substrate in the presence of fluids, such as cleaning chemistry, to cut, rip and tear the bevel polymer from the edge of the substrate.
Public/Granted literature
- US20090113656A1 Apparatus for isolated bevel edge clean and method for using the same Public/Granted day:2009-05-07
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