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公开(公告)号：US08298433B2
公开(公告)日：2012-10-30
申请号：US12648264
申请日：2009-12-28
IPC分类号： C23F1/00 , H01L21/3065 , C23C16/505
CPC分类号： H01L21/02087 , H01J37/32541 , H01J37/3255 , H05H1/2406 , H05H2001/2412
摘要： A method for generating plasma for removing an edge polymer from a substrate is provided. The method includes providing a powered electrode assembly, which includes a powered electrode, a dielectric layer, and a wire mesh disposed between the powered electrode and the dielectric layer. The method also includes providing a grounded electrode assembly disposed opposite the powered electrode assembly to form a cavity wherein the plasma is generated. The wire mesh is shielded from the plasma by the dielectric layer when the plasma is present in the cavity, which has an outlet at one end for providing the plasma to remove the edge polymer. The method further includes introducing at least one inert gas and at least one process gas into the cavity. The method yet also includes applying an RF field to the cavity using the powered electrode to generate the plasma from the inert gas and process gas.
摘要翻译： 提供了一种用于从衬底除去边缘聚合物的等离子体的方法。 该方法包括提供一种动力电极组件，其包括供电电极，电介质层和布置在电源电极和电介质层之间的金属丝网。 该方法还包括提供与动力电极组件相对设置的接地电极组件，以形成其中产生等离子体的空腔。 当等离子体存在于空腔中时，金属丝网通过电介质层被屏蔽，等离子体在一端具有出口，用于提供等离子体以去除边缘聚合物。 该方法还包括将至少一种惰性气体和至少一种工艺气体引入空腔中。 该方法还包括使用动力电极将RF场施加到空腔，以从惰性气体和处理气体产生等离子体。
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公开(公告)号：US07935156B2
公开(公告)日：2011-05-03
申请号：US11986485
申请日：2007-11-20
IPC分类号： C10L1/10
CPC分类号： C10L1/04 , C10L1/1608 , C12P5/00 , C12P5/007
摘要： Provided herein are, among other things, jet fuel compositions and methods of making and using the same. In some embodiments, the fuel compositions comprise at least a fuel component readily and efficiently produced, at least in part, from a microorganism. In certain embodiments, the fuel compositions provided herein comprise a high concentration of at least a bioengineered fuel component. In further embodiments, the fuel compositions provided herein comprise limonane.
摘要翻译： 喷雾燃料组合物及其制备和使用方法尤其如此。 在一些实施方案中，燃料组合物至少部分地由微生物包含至少一种燃料成分，并且至少部分地有效地产生。 在某些实施方案中，本文提供的燃料组合物包含高浓度的至少一种生物工程燃料组分。 在另外的实施方案中，本文提供的燃料组合物包含柠檬醛。
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公开(公告)号：US07758404B1
公开(公告)日：2010-07-20
申请号：US11253118
申请日：2005-10-17
申请人： Jason A. Ryder , Ji Zhu , Mark Wilcoxson , Fritz Redeker , John P. Parks , Charles Ditmore , Jeffrey G. Gasparitsch
发明人： Jason A. Ryder , Ji Zhu , Mark Wilcoxson , Fritz Redeker , John P. Parks , Charles Ditmore , Jeffrey G. Gasparitsch
IPC分类号： B24B1/00
摘要： An apparatus, system and method for cleaning a substrate edge include a composite applicator that cleans bevel polymers deposited on wafer edges using frictional contact in the presence of fluids. The composite applicator includes a support material and a plurality of abrasive particles distributed within and throughout the support material. The composite applicator cleans the edge of the wafer by allowing frictional contact of the plurality of abrasive particles with the edge of the wafer in the presence of fluids, such as liquid chemicals, to cut, rip and tear the bevel polymer from the edge of the wafer.
摘要翻译： 用于清洁基材边缘的装置，系统和方法包括复合涂布器，其在存在流体的情况下使用摩擦接触来清洁沉积在晶片边缘上的斜面聚合物。 复合施加器包括支撑材料和分布在支撑材料内部和整个支撑材料上的多个磨料颗粒。 复合涂抹器通过在诸如液体化学品的流体的存在下允许多个研磨颗粒与晶片的边缘摩擦接触来清洁晶片的边缘，以从斜边聚合物的边缘切割，撕裂和撕裂斜面聚合物 晶圆。
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公开(公告)号：US20120118320A1
公开(公告)日：2012-05-17
申请号：US13357559
申请日：2012-01-24
申请人： Hyungsuk Alexander Yoon , Andrew D. Bailey, III , Jason A. Ryder , Mark H. Wilcoxon , Jeffrey G. Gasparitsch , Randy Johnson , Stephan P. Hoffmann
发明人： Hyungsuk Alexander Yoon , Andrew D. Bailey, III , Jason A. Ryder , Mark H. Wilcoxon , Jeffrey G. Gasparitsch , Randy Johnson , Stephan P. Hoffmann
CPC分类号： H01L21/67046 , Y10S134/902
摘要： Methods for cleaning an edge of a semiconductor substrate include providing a brush in a housing, the housing provides a volume for holding the brush. A cleaning fluid is inserted into the housing to at least partially fill the volume holding the brush, with the cleaning fluid. The cleaning fluid is removed from the volume of the housing while the cleaning fluid is being inserted. The brush is rotated within the housing while the cleaning fluid is inserted and removed. The edge of the semiconductor substrate is inserted into a slot of the housing. The edge of the semiconductor substrate inserted into the slot is maintained at a distance and for a period of time. The distance is configured such that the brush contacts the edge of the semiconductor substrate but continues to enable rotation of the brush within the housing.
摘要翻译： 用于清洁半导体衬底的边缘的方法包括在壳体中设置刷子，所述壳体提供用于保持刷子的体积。 将清洁流体插入壳体中以至少部分地填充保持刷子的体积与清洁流体。 在清洁流体被插入时，清洁流体从壳体的体积中移除。 当清洁流体被插入和移除时，刷子在壳体内旋转。 将半导体衬底的边缘插入壳体的槽中。 插入槽中的半导体衬底的边缘保持一段距离并持续一段时间。 该距离被配置成使得电刷接触半导体衬底的边缘，但是继续能够使电刷在壳体内旋转。
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公开(公告)号：US07942940B2
公开(公告)日：2011-05-17
申请号：US11986484
申请日：2007-11-20
CPC分类号： C10L1/1608 , C10L1/04 , C10L1/143 , C12P5/00 , C12P5/007
摘要： Provided herein are, among other things, jet fuel compositions and methods of making and using the same. In some embodiments, the fuel compositions comprise at least a fuel component readily and efficiently produced, at least in part, from a microorganism. In certain embodiments, the fuel compositions provided herein comprise a high concentration of at least a bioengineered fuel component. In further embodiments, the fuel compositions provided herein comprise a C10 bicyclic isoprenoid such as carane, pinane, sabinane or a combination thereof.
摘要翻译： 喷雾燃料组合物及其制备和使用方法尤其如此。 在一些实施方案中，燃料组合物至少部分地由微生物包含至少一种燃料成分，并且至少部分地有效地产生。 在某些实施方案中，本文提供的燃料组合物包含高浓度的至少一种生物工程燃料组分。 在另外的实施方案中，本文提供的燃料组合物包含C10双环类异戊二烯，例如癸烷，蒎烷，沙宾或其组合。
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6.发明授权Apparatus for the removal of an edge polymer from a substrate and methods therefor 有权用于从衬底去除边缘聚合物的设备及其方法公开(公告)号：US07651585B2
公开(公告)日：2010-01-26
申请号：US11236170
申请日：2005-09-26
IPC分类号： C23F1/00 , H01L21/306 , C23C16/00
CPC分类号： H01L21/02087 , H01J37/32541 , H01J37/3255 , H05H1/2406 , H05H2001/2412
摘要： An apparatus generating a plasma for removing an edge polymer from a substrate is disclosed. The embodiment includes a powered electrode assembly, including a powered electrode, a first dielectric layer, and a first wire mesh disposed between the powered electrode and the first dielectric layer. The embodiment also includes a grounded electrode assembly disposed opposite the powered electrode assembly so as to form a cavity wherein the plasma is generated, the first wire mesh being shielded from the plasma by the first dielectric layer when the plasma is present in the cavity, the cavity having an outlet at one end for providing the plasma to remove the edge polymer.
摘要翻译： 公开了一种生成用于从基板去除边缘聚合物的等离子体的装置。 该实施例包括动力电极组件，其包括供电电极，第一介电层和设置在电源电极和第一介电层之间的第一丝网。 该实施例还包括与动力电极组件相对设置的接地电极组件，以便形成其中产生等离子体的空腔，当等离子体存在于空腔中时，第一金属丝网被第一介电层与等离子体屏蔽， 空腔在一端具有出口，用于提供等离子体以去除边缘聚合物。
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公开(公告)号：US07806944B2
公开(公告)日：2010-10-05
申请号：US12175465
申请日：2008-07-18
申请人： Jason A. Ryder , Karl Fisher
发明人： Jason A. Ryder , Karl Fisher
IPC分类号： C10L1/16
摘要： A fuel composition comprises at least a tetramethylcyclohexane and a fuel component. The tetramethylcyclohexane can be used as a fuel component or as a fuel additive in the fuel composition. The fuel composition may further comprise a conventional fuel component selected from a petroleum-based fuel component such as diesel fuel, jet fuel, kerosene or gasoline; or a coal-based fuel component. Methods of making and using the fuel composition are also disclosed.
摘要翻译： 燃料组合物至少包含四甲基环己烷和燃料组分。 四甲基环己烷可以用作燃料组分或燃料组合物中的燃料添加剂。 燃料组合物可以进一步包括选自石油基燃料组分如柴油，喷气燃料，煤油或汽油的常规燃料组分; 或煤基燃料组分。 还公开了制备和使用燃料组合物的方法。
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公开(公告)号：US20090272352A1
公开(公告)日：2009-11-05
申请号：US12431769
申请日：2009-04-29
申请人： Jason A. Ryder
发明人： Jason A. Ryder
CPC分类号： C10L1/04 , C10L1/06 , C10L1/08 , C10L1/1608 , C10L1/1616 , Y10S208/95
摘要： Provided herein are, among other things, jet fuel compositions and methods of making and using the same. In some embodiments, the fuel compositions comprise at least a fuel component readily and efficiently produced, at least in part, from a microorganism. In certain embodiments, the fuel compositions provided herein comprise a high concentration of at least a bioengineered fuel component. In further embodiments, the fuel compositions provided herein comprise amorphane.
摘要翻译： 喷雾燃料组合物及其制备和使用方法尤其如此。 在一些实施方案中，燃料组合物至少部分地由微生物包含至少一种燃料成分，并且至少部分地有效地产生。 在某些实施方案中，本文提供的燃料组合物包含高浓度的至少一种生物工程燃料组分。 在另外的实施方案中，本文提供的燃料组合物包括不可见的。
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公开(公告)号：US20090272119A1
公开(公告)日：2009-11-05
申请号：US12432733
申请日：2009-04-29
申请人： Jason A. Ryder
发明人： Jason A. Ryder
CPC分类号： C10L1/04 , C10L1/06 , C10L1/08 , C10L1/1608 , C10L1/1616 , Y10S208/95
摘要： Provided herein are, among other things, jet fuel compositions and methods of making and using the same. In some embodiments, the fuel compositions comprise at least a fuel component readily and efficiently produced, at least in part, from a microorganism. In certain embodiments, the fuel compositions provided herein comprise a high concentration of at least a bioengineered fuel component. In further embodiments, the fuel compositions provided herein comprise amorphane.
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公开(公告)号：US07540888B2
公开(公告)日：2009-06-02
申请号：US12175468
申请日：2008-07-18
申请人： Jason A. Ryder , Karl Fisher
发明人： Jason A. Ryder , Karl Fisher
IPC分类号： C10L1/18
摘要： A fuel composition comprises at least a tetramethylcyclohexane having a quaternary carbon atom in the cyclohexane ring and optionally, a fuel component. The tetramethylcyclohexane can be used as a fuel component or as a fuel additive in the fuel composition. The fuel composition may further comprise a conventional fuel component selected from a diesel fuel, jet fuel, kerosene or gasoline. Methods of making and using the fuel composition are also disclosed.
摘要翻译： 燃料组合物至少包含在环己烷环中具有季碳原子的四甲基环己烷和任选的燃料组分。 四甲基环己烷可以用作燃料组分或燃料组合物中的燃料添加剂。 燃料组合物还可包含选自柴油，喷气燃料，煤油或汽油的常规燃料成分。 还公开了制备和使用燃料组合物的方法。
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