Invention Grant
- Patent Title: Colored mask combined with selective area deposition
- Patent Title (中): 彩色面罩与选择性区域沉积相结合
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Application No.: US11986169Application Date: 2007-11-20
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Publication No.: US08129098B2Publication Date: 2012-03-06
- Inventor: Lyn M. Irving , Diane C. Freeman , Peter J. Cowdery-Corvan , Cheng Yang , David H. Levy
- Applicant: Lyn M. Irving , Diane C. Freeman , Peter J. Cowdery-Corvan , Cheng Yang , David H. Levy
- Applicant Address: US NY Rochester
- Assignee: Eastman Kodak Company
- Current Assignee: Eastman Kodak Company
- Current Assignee Address: US NY Rochester
- Agent J. Lanny Tucker
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
The invention relates to a process for forming a structure comprising (a) providing a transparent support; (b) forming a color mask on a first side of the transparent support; (c) applying a first layer comprising a deposition inhibitor material that is sensitive to visible light; (d) patterning the first layer by exposing the first layer through the color mask with visible light to form a first pattern and developing the deposition inhibitor material to provide selected areas of the first layer effectively not having the deposition inhibitor material; and (e) depositing a second layer of functional material over the transparent support; wherein the second layer of functional material is substantially deposited only in selected areas over the transparent support not having the deposition inhibitor material.
Public/Granted literature
- US20090130609A1 Colored mask combined with selective area deposition Public/Granted day:2009-05-21
Information query
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