Invention Grant
- Patent Title: Process and system for providing acetylene
- Patent Title (中): 提供乙炔的工艺和系统
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Application No.: US12554052Application Date: 2009-09-04
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Publication No.: US08129577B2Publication Date: 2012-03-06
- Inventor: Timothy John Maykut , Suhas Narayan Ketkar , Benjamin James Arthur Inman , John Irven , Eugene Joseph Karwacki, Jr. , Neil Alexander Downie
- Applicant: Timothy John Maykut , Suhas Narayan Ketkar , Benjamin James Arthur Inman , John Irven , Eugene Joseph Karwacki, Jr. , Neil Alexander Downie
- Applicant Address: US PA Allentown
- Assignee: Air Products and Chemicals, Inc.
- Current Assignee: Air Products and Chemicals, Inc.
- Current Assignee Address: US PA Allentown
- Agent Rosaleen P. Morris-Oskanian; Joseph D. Rossi
- Main IPC: B65B1/04
- IPC: B65B1/04

Abstract:
A system and a process for providing acetylene, preferably at a high purity level (e.g., comprising 100 parts per million (“ppm”), or 10 ppm, or 1 ppm, or 100 parts per billion (“ppb”), or 10 ppb, or 1 ppb or less of solvent), to a point of use, such as a semiconductor manufacturing process, is described herein. In one aspect, there is provided a process for providing a process for providing a high purity acetylene comprising 100 ppm or less solvent to a point of use comprising: providing an acetylene feed stream comprising acetylene and solvent at a temperature ranging from 20° C. to −50° C.; and introducing the acetylene feed stream to a purifier at a temperature ranging from −50° C. to 30° C. to remove at least a portion of the solvent contained therein and provide the high purity acetylene.
Public/Granted literature
- US20100069689A1 Process and System for Providing Acetylene Public/Granted day:2010-03-18
Information query
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