Process and system for providing acetylene
    3.
    发明授权
    Process and system for providing acetylene 有权
    提供乙炔的工艺和系统

    公开(公告)号:US08129577B2

    公开(公告)日:2012-03-06

    申请号:US12554052

    申请日:2009-09-04

    IPC分类号: B65B1/04

    CPC分类号: C07C7/09 C07C11/24

    摘要: A system and a process for providing acetylene, preferably at a high purity level (e.g., comprising 100 parts per million (“ppm”), or 10 ppm, or 1 ppm, or 100 parts per billion (“ppb”), or 10 ppb, or 1 ppb or less of solvent), to a point of use, such as a semiconductor manufacturing process, is described herein. In one aspect, there is provided a process for providing a process for providing a high purity acetylene comprising 100 ppm or less solvent to a point of use comprising: providing an acetylene feed stream comprising acetylene and solvent at a temperature ranging from 20° C. to −50° C.; and introducing the acetylene feed stream to a purifier at a temperature ranging from −50° C. to 30° C. to remove at least a portion of the solvent contained therein and provide the high purity acetylene.

    摘要翻译: 用于提供乙炔的系统和方法,优选在高纯度水平(例如,包括100ppm(“ppm”)或10ppm,或1ppm,或100ppm(“ppb”)或10 ppb或1ppb或更少的溶剂),到本文中描述的诸如半导体制造工艺的使用点。 在一个方面,提供了一种方法,用于提供一种方法,该方法提供包含100ppm或更少溶剂的高纯度乙炔到使用点,包括:在20℃的温度下提供包含乙炔和溶剂的乙炔进料流 至-50℃。 并在-50℃至30℃的温度范围内将乙炔进料流引入净化器中以除去其中所含溶剂的至少一部分,并提供高纯度乙炔。

    Process and System for Providing Acetylene
    4.
    发明申请
    Process and System for Providing Acetylene 有权
    提供乙炔的工艺和体系

    公开(公告)号:US20100069689A1

    公开(公告)日:2010-03-18

    申请号:US12554052

    申请日:2009-09-04

    IPC分类号: C07C11/24 B01D53/14

    CPC分类号: C07C7/09 C07C11/24

    摘要: A system and a process for providing acetylene, preferably at a high purity level (e.g., comprising 100 parts per million (“ppm”), or 10 ppm, or 1 ppm, or 100 parts per billion (“ppb”), or 10 ppb, or 1 ppb or less of solvent), to a point of use, such as a semiconductor manufacturing process, is described herein. In one aspect, there is provided a process for providing a process for providing a high purity acetylene comprising 100 ppm or less solvent to a point of use comprising: providing an acetylene feed stream comprising acetylene and solvent at a temperature ranging from 20° C. to −50° C.; and introducing the acetylene feed stream to a purifier at a temperature ranging from −50° C. to 30° C. to remove at least a portion of the solvent contained therein and provide the high purity acetylene.

    摘要翻译: 用于提供乙炔的系统和方法,优选在高纯度水平(例如,包括100ppm(“ppm”)或10ppm,或1ppm,或100ppm(“ppb”)或10 ppb或1ppb或更少的溶剂),到本文中描述的诸如半导体制造工艺的使用点。 在一个方面,提供了一种方法,用于提供一种方法,该方法提供包含100ppm或更少溶剂的高纯度乙炔到使用点,包括:在20℃的温度下提供包含乙炔和溶剂的乙炔进料流 至-50℃。 并在-50℃至30℃的温度范围内将乙炔进料流引入净化器中以除去其中所含溶剂的至少一部分,并提供高纯度乙炔。