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Invention Grant
US08134124B2 Method for creating S/tem sample and sample structure 有权
创建样品和样品结构的方法

  • Patent Title: Method for creating S/tem sample and sample structure
  • Patent Title (中): 创建样品和样品结构的方法
  • Application No.: US12446420
    Application Date: 2007-10-22
  • Publication No.: US08134124B2
    Publication Date: 2012-03-13
  • Inventor: Jeff Blackwood , Stacey Stone
  • Applicant: Jeff Blackwood , Stacey Stone
  • Applicant Address: US OR Hillsboro
  • Assignee: FEI Company
  • Current Assignee: FEI Company
  • Current Assignee Address: US OR Hillsboro
  • Agency: Scheinberg & Griner, LLP
  • Agent Michael O. Scheinberg; David Griner
  • International Application: PCT/US2007/082159 WO 20071022
  • International Announcement: WO2008/051937 WO 20080502
  • Main IPC: G01N1/28
  • IPC: G01N1/28 ;  G01R31/305
Method for creating S/tem sample and sample structure
Abstract:
An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (
Abstract(Chinese):

一种用于S / TEM样品制备和分析的改进方法和装置。 本发明的优选实施例提供用于TEM样品制备的改进方法，特别是对于小几何（<100nm厚）TEM薄片。 新颖的样品结构和铣削图案的新颖应用允许产生薄至50nm的S / TEM样品，而没有显着的弯曲或翘曲。 本发明的优选实施方案提供了部分或全部自动化TEM样品制备的方法，使TEM样品的创建和分析过程减少劳动密集度，并提高TEM分析的产量和再现性。

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