Invention Grant
- Patent Title: Surface acoustic wave device and surface acoustic wave biosensor
- Patent Title (中): 表面声波装置和表面声波生物传感器
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Application No.: US12700307Application Date: 2010-02-04
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Publication No.: US08134278B2Publication Date: 2012-03-13
- Inventor: Eun Chol Cho , Hun Joo Lee , Soo Suk Lee
- Applicant: Eun Chol Cho , Hun Joo Lee , Soo Suk Lee
- Applicant Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: KR10-2009-0091060 20090925
- Main IPC: H01L41/08
- IPC: H01L41/08
Abstract:
A surface acoustic wave device, including: a piezoelectric substrate; an interdigitated transducer electrode disposed on the substrate; an oxide film disposed on surface of the interdigitated transducer electrode; and a hydrophobic film disposed on a surface of the oxide film.
Public/Granted literature
- US20110073474A1 SURFACE ACOUSTIC WAVE DEVICE AND SURFACE ACOUSTIC WAVE BIOSENSOR Public/Granted day:2011-03-31
Information query
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