发明授权
- 专利标题: Dynamic range extension in surface inspection systems
- 专利标题(中): 表面检测系统的动态范围扩展
-
申请号: US12049091申请日: 2008-03-14
-
公开(公告)号: US08134698B1公开(公告)日: 2012-03-13
- 发明人: Christian Wolters , Anatoly Romanovsky , Daniel Kavaldjiev , Bret Whiteside
- 申请人: Christian Wolters , Anatoly Romanovsky , Daniel Kavaldjiev , Bret Whiteside
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Corporation
- 当前专利权人: KLA-Tencor Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Luedeka Neely Group, P.C.
- 主分类号: G01N21/00
- IPC分类号: G01N21/00
摘要:
In one embodiment, a surface analyzer system comprises a radiation targeting assembly to target a radiation beam onto a surface; and a scattered radiation collecting assembly that collects radiation scattered from the surface. The radiation targeting assembly generates primary and secondary beams. Data collected from the reflections of the primary and secondary beams may be used in a dynamic range extension routine, alone or in combination with a power attenuation routine.