Invention Grant
- Patent Title: Processing system, processing method, and storage medium
- Patent Title (中): 处理系统,处理方法和存储介质
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Application No.: US12308372Application Date: 2007-11-12
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Publication No.: US08136538B2Publication Date: 2012-03-20
- Inventor: Yoshifumi Amano
- Applicant: Yoshifumi Amano
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Smith, Gambrell & Russell; LLP
- Priority: JP2006-309210 20061115
- International Application: PCT/JP2007/071935 WO 20071112
- International Announcement: WO2008/059799 WO 20080522
- Main IPC: B08B7/00
- IPC: B08B7/00 ; B08B7/04

Abstract:
A processing system 1 comprises: a processing vessel 30 configured to accommodate an object to be processed W in a processing space 83; a process-fluid generating part 41 configured to generate a process fluid of a predetermined temperature; and a main duct 56 arranged between the process-fluid generating part 41 and the processing vessel 30, the main duct 56 being configured to guide the process fluid supplied from the process-fluid generating part 41. A process-fluid supply duct 171 is arranged on a downstream side of the main duct 56 via a switching valve 70, the process-fluid supply duct 171 being configured to introduce the process fluid into the processing space 83 of the processing vessel 30. A process-fluid bypass duct 172 is arranged on the downstream side of the main duct 56 via the switching valve 70, the process-fluid bypass duct 172 being configured to guide a process fluid, which is not introduced to the process-fluid supply duct 171, so as to bypass the processing space 83. The main duct 56 is provided with a flow-rate adjusting mechanism 65 for adjusting a flow rate of the process fluid flowing through the main duct 56.
Public/Granted literature
- US20100154836A1 Processing system, processing method, and storage medium Public/Granted day:2010-06-24
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