公开(公告)号：US09008817B2

公开(公告)日：2015-04-14

申请号：US13104374

申请日：2011-05-10

Applicant: Yoshifumi Amano

Inventor： Yoshifumi Amano

IPC: H01L21/67 ,  H01L21/68

CPC classification number: H01L21/68 ,  H01L21/67046 ,  H01L21/67051

Abstract: Disclosed is a substrate positioning apparatus capable of accurately performing positioning of a center of a circular-shape substrate with respect to a rotating shaft. The substrate positioning apparatus includes: a substrate disposing part; a first positioning mechanism including a first reference part contacting a side of the substrate; a second positioning mechanism including a second reference part contacting the side of the substrate; a first driver configured to drive the first positioning mechanism; a controller configured to control the drive of the first positioning mechanism. In particular, the second reference part contacts the substrate at a contact part and includes an elastic part that applies force in a moving direction of the first driver to the contact part and a detector that detects position information of the second positioning mechanism.

Abstract translation: 公开了一种能够相对于旋转轴精确地进行圆形基板的中心的定位的基板定位装置。 基板定位装置包括：基板设置部; 第一定位机构，包括接触所述基板的一侧的第一参考部分; 第二定位机构，包括接触所述基板一侧的第二参考部分; 配置为驱动第一定位机构的第一驱动器; 控制器，被配置为控制第一定位机构的驱动。 特别地，第二参考部分在接触部分处接触基板，并且包括在第一驱动器的移动方向上向接触部分施加力的弹性部分和检测第二定位机构的位置信息的检测器。

公开(公告)号：US08684014B2

公开(公告)日：2014-04-01

申请号：US12849357

申请日：2010-08-03

Applicant: Yoshifumi Amano ,  Tsuyoshi Mizuno

Inventor： Yoshifumi Amano ,  Tsuyoshi Mizuno

IPC: B08B3/04

CPC classification number: H01L21/67051 ,  H01L21/6708 ,  H01L21/67109

Abstract: Disclosed is a liquid processing apparatus and a liquid processing method, which can process an entire wafer at a sufficiently high temperature and can sufficiently suppress adhesion of particles on a surface of the wafer, when the peripheral portion of the wafer is processed. The liquid processing apparatus includes a holding part to hold the substrate, a rotation driving part to rotate the holding part, and a shield unit. The shield unit includes an opposed plate opposed to the substrate held by the holding part, a heating part to heat the substrate through the opposed plate, and a heated gas supplying part to supply heated gas to a surface of the substrate held by the holding part.

Abstract translation: 公开了一种液体处理装置和液体处理方法，其可以在足够高的温度下处理整个晶片，并且可以充分地抑制晶片的周边部分处理颗粒在晶片表面上的粘附。 液体处理装置包括用于保持基板的保持部分，旋转驱动部分以使保持部分旋转，以及屏蔽单元。 屏蔽单元包括与由保持部保持的基板相对的相对板，通过相对板加热基板的加热部分和加热气体供应部分，以将加热气体供应到由保持部分保持的基板的表面 。

公开(公告)号：US08480847B2

公开(公告)日：2013-07-09

申请号：US12309974

申请日：2008-01-28

Applicant: Yoshifumi Amano

Inventor： Yoshifumi Amano

IPC: H01L21/306

CPC classification number: H01L21/67178 ,  H01L21/67017 ,  H01L21/67253

Abstract: A processing system adapted for processing an object to be processed, including a processing vessel configured for containing the object to be processed and for receiving a processing fluid, a processing fluid generating unit configured for generating a processing fluid, a processing-side fluid passage configured for supplying the processing fluid into the processing vessel, and a discharge fluid passage configured for discharging the processing fluid from the processing vessel. The processing system further includes a bypass-side fluid passage configured for discharging the processing fluid generated in the processing fluid generating unit without passing it through the processing vessel, a pressure control mechanism provided to the discharge fluid passage downstream from a position at which the bypass-side fluid passage is connected with the discharge fluid passage, and a switch valve configured to selectively switch a fluid passage of the processing fluid between the processing-side fluid passage and the bypass-side fluid passage.

Abstract translation: 一种适于处理被处理物体的处理系统，包括：被配置为容纳待处理物体并用于接收处理流体的处理容器;被配置为产生处理流体的处理流体生成单元，配置在处理流体通道中的处理侧流体通道 用于将处理流体供应到处理容器中;以及排出流体通道，其构造成用于从处理容器排出处理流体。 处理系统还包括旁路侧流体通道，其构造成用于排出在处理流体产生单元中产生的处理流体而不使其通过处理容器;压力控制机构，其设置在排出流体通道的下游， 流体通道与排出流体通道连接，以及切换阀，其构造成选择性地切换处理流体在处理侧流体通道和旁路侧流体通道之间的流体通道。

公开(公告)号：US20100000682A1

公开(公告)日：2010-01-07

申请号：US12309974

申请日：2008-01-28

Applicant: Yoshifumi Amano

Inventor： Yoshifumi Amano

IPC: H01L21/302

CPC classification number: H01L21/67178 ,  H01L21/67017 ,  H01L21/67253

Abstract: In a processing system adapted for processing an object to be processed, by supplying a processing fluid into a processing vessel, the supply of the processing fluid into the processing vessel is significantly stabilized. This processing system includes the processing vessel configured to contain the object to be processed, a processing fluid generating unit configured to generate the processing fluid, a processing-side fluid passage configured for supplying the processing fluid generated in the processing fluid generating unit into the processing vessel, and a discharge fluid passage configured for discharging the processing fluid from the processing vessel. The processing system further includes a bypass-side fluid passage connected with the discharge fluid passage at its downstream end and configured for discharging the processing fluid generated in the processing fluid generating unit without passing it through the processing vessel, a pressure control mechanism provided to the discharge fluid passage downstream from a position in which the downstream end of the bypass-side fluid passage is connected with the discharge fluid passage, and a switch valve configured to selectively switch a fluid passage, through which the processing fluid generated in the processing fluid generating unit is fed, between the processing-side fluid passage and the bypass-side fluid passage.

Abstract translation: 在适于处理待加工物体的处理系统中，通过将处理流体供给到处理容器中，处理容器的供应被显着地稳定。 该处理系统包括构造成容纳被处理物的处理容器，被配置为产生处理流体的处理流体生成单元，被配置为将处理流体生成单元中生成的处理流体供给到处理流体生成单元的处理流程 容器和排出流体通道，其构造成用于从处理容器排出处理流体。 处理系统还包括旁通侧流体通道，其在其下游端与排出流体通道连接，并且构造成用于排出在处理流体生成单元中产生的处理流体，而不使其通过处理容器;压力控制机构， 在旁路侧流体通道的下游端与排出流体通道连接的位置下游的排出流体通道;以及切换阀，其构造成选择性地切换流体通道，通过该流体通道在生成处理流体中产生的处理流体 在处理侧流体通道和旁路侧流体通道之间供给单元。

公开(公告)号：US20070285013A1

公开(公告)日：2007-12-13

申请号：US11578493

申请日：2004-09-22

Applicant: Yoshifumi Amano

Inventor： Yoshifumi Amano

IPC: H01J17/49 ,  G09G3/288 ,  H01J11/02

CPC classification number: G09G3/294 ,  G09G3/2983 ,  G09G3/2986 ,  G09G2310/0218 ,  H01J11/12 ,  H01J11/28

Abstract: The present invention is to provide an AC type PDP which can be manufactured by an inexpensive thick-film process without a thin-film process which is difficult to manufacture an MgO protection layer and the like and which has a panel structure that can be driven at a low voltage. Of a pair of discharge electrodes, one electrode is formed as a so-called AC type electrode in which a conducting electrode material is formed as an independent floating electrode separated at every pixel, this floating electrode being connected through a dielectric layer to a bus electrode in a capacity coupling fashion. The other discharge electrode is formed as a so-called DC type electrode in which a bus electrode is exposed to the discharge space as it is. The above-mentioned two electrodes are paired to form an AC type PDP which carries out discharge display

Abstract translation: 本发明提供一种AC型PDP，其可以通过廉价的厚膜工艺制造，而不需要制造MgO保护层等的薄膜工艺，并且具有可以在 低电压。 在一对放电电极中，一个电极形成为所谓的AC型电极，其中形成导电电极材料作为在每个像素处分离的独立浮动电极，该浮动电极通过电介质层连接到总线电极 以容量耦合方式。 另一个放电电极形成为其中总线电极原样暴露于放电空间的所谓DC型电极。 上述两个电极成对形成进行放电显示的AC型PDP

公开(公告)号：US20050127838A1

公开(公告)日：2005-06-16

申请号：US10504401

申请日：2003-09-16

Applicant: Yoshifumi Amano

Inventor： Yoshifumi Amano

IPC: H01J11/40 ,  H01J11/12 ,  H01J11/14 ,  H01J11/16 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/30 ,  H01J11/32 ,  H01J11/34 ,  H01J11/36 ,  H01J11/38 ,  H01J11/42 ,  H01J17/49

CPC classification number: H01J11/24 ,  H01J11/14 ,  H01J11/28 ,  H01J11/38 ,  H01J2211/225

Abstract: Almost only choice by a secondary electron emission layer/protection layer covering the dielectric layer of an AC type PDP has been magnesium oxide (MgO) that is unstable during the production process and difficult to form, thus posing a serious production problem. An AC type PDP constructed such that, instead of covering the surface of a dielectric layer (3) with a dielectric material such as MgO, an insular electrode (4) is made by forming a conductive material such as nickel, aluminum, magnesium and lanthanum hexaboride into an insular shape, and the insular electrode (4) is allowed to capacity-couple with a lower-layer bus electrode (9) by means of an electrostatic capacity formed by a dielectric layer (3) to operate the insular electrode (4) as a sustained electrode.

Abstract translation: 通过覆盖AC型PDP的电介质层的二次电子发射层/保护层的几乎只有选择是在制造过程中不稳定并且难以形成的氧化镁（MgO），从而造成严重的生产问题。 一种AC型PDP，其形成为通过形成诸如镍，铝，镁和镧的导电材料而不是用例如MgO等电介质材料覆盖电介质层（3）的表面，而形成岛状电极（4） 六面体形成岛状，并且通过由电介质层（3）形成的静电电容使岛状电极（4）与下层总线电极（9）电容耦合，以操作岛状电极（4） ）作为持续电极。

公开(公告)号：US5420601A

公开(公告)日：1995-05-30

申请号：US113987

申请日：1993-08-30

Applicant: Yoshifumi Amano

Inventor： Yoshifumi Amano

IPC: G09G3/2813 ,  G09G3/282 ,  G09G3/288 ,  G09G3/291 ,  G09G3/292 ,  G09G3/293 ,  G09G3/294 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/28 ,  H01J11/34 ,  G09G3/22

CPC classification number: G09G3/2813 ,  G09G3/293 ,  G09G2320/0228

Abstract: A method of driving an indicator tube comprised of a pair of common memory electrode plates and independent address XY electrode groups separate therefrom comprises the steps of, in a case where an address discharge is to be carried out by the XY electrode groups from a state that no wall charge uniformly exists on wall surfaces of the pair of memory electrodes in all cells on a picture screen or on a line to be addressed, holding one of the pair of memory electrodes at a potential higher than a discharge space potential generated by an address discharge in a range such that a discharge is not caused on the low voltage side of the address electrode during an address period, holding the other of the pair of memory electrodes at a potential lower than the discharge space potential in a range such that a discharge is not caused on the high voltage side of the address electrode, selectively accumulating charged particles generated by the address discharge in cells disposed at the positions corresponding to an image as negative and positive wall charges, and continuously effecting a display discharge, or memory discharge utilizing a presence or absence of the wall charges as position information.

Abstract translation: 一种驱动由一对公共记忆电极板和独立地址XY电极组分开的指示器管的方法包括以下步骤：在由XY电极组进行寻址放电的情况下， 在图像屏幕或要寻址的线路上的所有单元中的一对存储器电极的壁表面上均匀地存在壁电荷，将一对存储器电极中的一个保持在高于由地址产生的放电空间电位的电位 在寻址周期期间在寻址电极的低电压侧不发生放电的范围内放电，将一对存储电极中的另一个保持在低于放电空间电位的电位，使得放电 不是在寻址电极的高电压侧引起的，因此选择性地将由位于该位置的单元中的寻址放电产生的带电粒子累积 对应于作为负壁和正壁电荷的图像，并且连续地进行显示放电，或者利用壁电荷的存在或不存在作为位置信息。

公开(公告)号：US4562434A

公开(公告)日：1985-12-31

申请号：US399799

申请日：1982-07-19

Applicant: Yoshifumi Amano

Inventor： Yoshifumi Amano

IPC: G09G3/282 ,  H01J17/49 ,  G09G3/28

CPC classification number: G09G3/282 ,  H01J17/492 ,  H01J17/494 ,  G09G3/2813

Abstract: A flat panel display device which has first and second insulating plates with at least one of the plates being transparent and a first plurality of parallel extending electrodes mounted on one side of the first plate and at least a second electrode mounted on one side of the second plate and covered with an insulating layer and a third plurality of parallel extending electrodes mounted on the insulating layer at a predetermined angle to the first electrodes with the first electrodes being spaced from and opposed to the third electrodes so as to define a cross-conductor matrix and a plurality of parallel insulating barriers mounted between the first electrodes and trigger and sequence pulses connected to the various electrodes so as to produce display signals so as to substantially reduce the number of driving electrodes required and also to reduce the driving voltages.

Abstract translation: 一种平板显示装置，其具有第一绝缘板和第二绝缘板，其中至少一个板是透明的，以及安装在第一板的一侧上的第一多个平行的延伸电极以及安装在第二板的一侧上的至少第二电极 并且覆盖有绝缘层和第三多个平行延伸电极，其以与第一电极成预定角度安装在绝缘层上，其中第一电极与第三电极间隔开并与第三电极相对，以便限定交叉导体矩阵 以及安装在第一电极之间的多个平行的绝缘屏障，以及连接到各个电极的触发和序列脉冲，以产生显示信号，从而大大减少所需的驱动电极的数量并降低驱动电压。

公开(公告)号：US3992577A

公开(公告)日：1976-11-16

申请号：US589901

申请日：1975-06-24

Applicant: Yoshifumi Amano ,  Toshio Shionoya

Inventor： Yoshifumi Amano ,  Toshio Shionoya

IPC: H04N5/66 ,  G09G3/28 ,  G09G3/282 ,  H04N5/70 ,  H04N3/10

CPC classification number: H04N5/70

Abstract: A video display system employing a flat display panel of X-Y matrix type, signal sampling means, "write in" and "read out" memory circuits serially connected between the signal sampling means and the display panel, and a novel signal control means connected to the "write in" and "read out" memory circuits wherein the number of lines or leads for distributing signals from the "read out" memory circuits to the display panel and the number of memory devices used in the "read out" memory circuits are reduced substantially.

Abstract translation: 采用XY矩阵型的平板显示面板的信号采集装置，串行连接在信号采样装置和显示面板之间的“写入”和“读出”存储电路的视频显示系统以及连接到信号采样装置的新颖的信号控制装置 “写入”和“读出”存储电路，其中用于将信号从“读出”存储器电路分配到显示面板的行数或引线数量以及在“读出”存储器电路中使用的存储器件的数量减少 实质上

公开(公告)号：US06900780B1

公开(公告)日：2005-05-31

申请号：US09068689

申请日：1997-09-18

Applicant: Yoshifumi Amano

Inventor： Yoshifumi Amano

IPC: G09G3/2813 ,  G09G3/288 ,  G09G3/291 ,  G09G3/292 ,  G09G3/293 ,  G09G3/294 ,  H01J11/12 ,  H01J11/14 ,  H01J11/22 ,  H01J11/24 ,  H01J11/26 ,  H01J11/30 ,  H01J11/34 ,  H01J11/36 ,  H01J11/40 ,  H01J11/42 ,  H01J11/50 ,  H01J17/49 ,  G09G3/28

CPC classification number: H01J11/00 ,  G09G3/2813 ,  G09G3/2922 ,  G09G3/294 ,  G09G3/297 ,  H01J2217/498

Abstract: According to the present invention, in a plasma display discharge tube in which a plurality of stripe-like anode electrodes (11) and a plurality of stripe-like cathode electrodes (9) are arranged at a predetermined interval to be crossed each other, to thereby constitute an X-Y matrix electrode with a space at each of the crossing portions thereof as a pixel and a plurality of pixels are selectively excited according to an image to display an image, there is provided a plasma display discharge tube in which there are provided an AC type memory electrode (1) arranged opposite to the X-Y matrix electrode (9) and (11) common to all the pixels, and an AC type auxiliary electrode (5) in contact with the AC type memory electrode (1) through an insulating layer and supplying an electric power through a coupling capacitor formed between the same and the AC type memory electrode (1), wherein a memory discharge display is performed between the X-Y matrix electrode (9) and (11) and the AC type memory electrode (1). According to the present invention with the above arrangement, the electrode structure can be simplified to reduce manufacturing steps in number, driving using a pulse memory scheme which can be conventionally realized by only a DC type plasma display discharge tube having high emission efficiency and excellent responsibility is made possible, and a plasma display discharge tube having a long-life AC type electrode can be obtained.

Abstract translation: 根据本发明，在等间隔显示放电管中，其中多个条状阳极电极（11）和多个条状阴极电极（9）以预定间隔排列成彼此交叉，以 从而构成XY矩阵电极，在其每个交叉部分具有空间作为像素，并且根据图像选择性地激励多个像素以显示图像，提供了一种等离子体显示放电管，其中设置有 AC型存储电极（1），与所有像素共用的XY矩阵电极（9）和（11）相对配置，以及通过绝缘体与AC型存储电极（1）接触的AC型辅助电极（5） 并且通过形成在所述AC型存储电极（1）之间的耦合电容器提供电力，其中在XY矩阵电极（9）和（11）之间执行存储器放电显示 ）和AC型存储电极（1）。 根据具有上述结构的本发明，可以简化电极结构以减少数量的制造步骤，使用脉冲存储器方案进行驱动，该脉冲存储器方案通常仅通过具有高排放效率和优异责任的直流型等离子体显示放电管实现 可以获得具有长寿命AC型电极的等离子显示放电管。