发明授权
- 专利标题: Variable resistance non-volatile memory cells and methods of fabricating same
- 专利标题(中): 可变电阻非易失性存储单元及其制造方法
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申请号: US12796084申请日: 2010-06-08
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公开(公告)号: US08138490B2公开(公告)日: 2012-03-20
- 发明人: Gyu-Hwan Oh , Shin-Jae Kang , In-Sun Park , Hyun-Seok Lim , Nak-Hyun Lim , Hyun-Suk Lee
- 申请人: Gyu-Hwan Oh , Shin-Jae Kang , In-Sun Park , Hyun-Seok Lim , Nak-Hyun Lim , Hyun-Suk Lee
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec, P.A.
- 优先权: KR10-2007-0059273 20070618
- 主分类号: H01L47/00
- IPC分类号: H01L47/00 ; H01L27/108 ; H01L29/94 ; H01L31/032
摘要:
Methods of fabricating integrated circuit memory cells and integrated circuit memory cells are disclosed. An integrated circuit memory cell can be fabricated by forming an ohmic layer on an upper surface of a conductive structure and extending away from the structure along at least a portion of a sidewall of an opening in an insulation layer. An electrode layer is formed on the ohmic layer. A variable resistivity material is formed on the insulation layer and electrically connected to the electrode layer.
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