发明授权
- 专利标题： Microresonator
- 专利标题（中）： 微谐振器
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申请号： US12850126申请日： 2010-08-04
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公开(公告)号： US08159109B2公开(公告)日： 2012-04-17
- 发明人: Nicolas Abelé , Pascal Ancey , Alexandre Talbot , Karim Segueni , Guillaume Bouche , Thomas Skotnicki , Stéphane Monfray , Fabrice Casset
- 申请人： Nicolas Abelé , Pascal Ancey , Alexandre Talbot , Karim Segueni , Guillaume Bouche , Thomas Skotnicki , Stéphane Monfray , Fabrice Casset
- 申请人地址： FR Crolles FR Montrouge
- 专利权人： STMicroelectronics (Crolles 2) SAS,STMicroelectronics S.A.
- 当前专利权人： STMicroelectronics (Crolles 2) SAS,STMicroelectronics S.A.
- 当前专利权人地址： FR Crolles FR Montrouge
- 代理机构： Wolf, Greenfield & Sacks, P.C.
- 优先权： FR0550276 20050131
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A microresonator comprising a single-crystal silicon resonant element and at least one activation electrode placed close to the resonant element, in which the resonant element is placed in an opening of a semiconductor layer covering a substrate, the activation electrode being formed in the semiconductor layer and being level at the opening.
公开/授权文献
- US20100295416A1 MICRORESONATOR 公开/授权日：2010-11-25