Invention Grant
- Patent Title: Chlorine, fluorine and lithium co-doped transparent conductive films and methods for fabricating the same
- Patent Title (中): 氯，氟和锂共掺杂的透明导电膜及其制造方法
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Application No.: US12260466Application Date: 2008-10-29
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Publication No.: US08163404B2Publication Date: 2012-04-24
- Inventor: Syh-Yuh Cheng , Chia-Hsin Lin , Chin-Ching Lin , Mei-Ching Chiang
- Applicant: Syh-Yuh Cheng , Chia-Hsin Lin , Chin-Ching Lin , Mei-Ching Chiang
- Applicant Address: TW
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW
- Agency: Lowe Hauptman Ham & Berner, LLP
- Priority: TW96149874A 20071225
- Main IPC: C23C16/40
- IPC: C23C16/40 ; C23C16/448 ; B32B9/04
Abstract:
A chlorine, fluorine and lithium co-doped transparent conductive film is provided, including chlorine, fluorine and lithium co-doped tin oxides, wherein the chlorine, fluorine and lithium co-doped tin oxides have a chlorine ion doping concentration not greater than 5 atom %, a fluorine ion doping concentration not greater than 5 atom %, and a lithium ion doping concentration not greater than 5 atom %.
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