发明授权
- 专利标题： Passivation process for solar cell fabrication
- 专利标题（中）： 太阳能电池制造的钝化过程
-
申请号： US12479139申请日： 2009-06-05
-
公开(公告)号： US08168462B2公开(公告)日： 2012-05-01
- 发明人: Peter Borden , Michael P. Stewart , Li Xu , Hemant P. Mungekar , Christopher S. Olsen
- 申请人： Peter Borden , Michael P. Stewart , Li Xu , Hemant P. Mungekar , Christopher S. Olsen
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson & Sheridan, LLP
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L31/0216
摘要：
Embodiments of the invention contemplate the formation of a high efficiency solar cell using a novel plasma oxidation process to form a passivation film stack on a surface of a solar cell substrate. In one embodiment, the methods include providing a substrate having a first type of doping atom on a back surface of the substrate and a second type of doping atom on a front surface of the substrate, plasma oxidizing the back surface of the substrate to form an oxidation layer thereon, and forming a silicon nitride layer on the oxidation layer.
公开/授权文献
- US20100311203A1 Passivation process for solar cell fabrication 公开/授权日：2010-12-09
信息查询
IPC分类:
