Invention Grant
US08169608B2 Optical characteristic measurement device and optical characteristic measurement method suitable for spectrum measurement 有权
适用于光谱测量的光学特性测量装置和光学特性测量方法

Optical characteristic measurement device and optical characteristic measurement method suitable for spectrum measurement
Abstract:
An optical characteristic measurement device includes a photodetector and a processor. The photodetector has a detection surface greater than a light incident surface receiving light from a spectrometer. The processor is configured to obtain a measurement spectrum detected in a first detection area corresponding to the light incident surface and a signal intensity detected in a second detection area different from the light incident surface, correct a pattern prepared in advance and exhibiting a noise characteristic of the photodetector based on the signal intensity to calculate a first correction spectrum, subtract a correction value calculated based on the signal intensity from each component value of the measurement spectrum to calculate a second correction spectrum, and subtract each component value of the first correction spectrum from a corresponding component value of the second correction spectrum to calculate an output spectrum.
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