Invention Grant
US08181522B2 Capacitive acceleration sensor having a movable mass and a spring element
有权
电容加速度传感器,具有可动质量块和弹簧元件
- Patent Title: Capacitive acceleration sensor having a movable mass and a spring element
- Patent Title (中): 电容加速度传感器,具有可动质量块和弹簧元件
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Application No.: US12254113Application Date: 2008-10-20
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Publication No.: US08181522B2Publication Date: 2012-05-22
- Inventor: Roland Scheuerer , Heribert Weber
- Applicant: Roland Scheuerer , Heribert Weber
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102007050116 20071019
- Main IPC: G01P15/125
- IPC: G01P15/125

Abstract:
An acceleration sensor having a mass which is movably supported outside its center of gravity, first electrodes on the mass and second electrodes located at a distance therefrom forming a capacitive sensor in order to determine a change in position of the mass as a function of time. At least one spring element which generates a restoring force when the mass is deflected from its neutral position is provided on the side of the mass facing the capacitive sensor. The mass may be obtained by being exposed from a material layer, and the mass is surrounded, at least at its side faces, by this material.
Public/Granted literature
- US20090100932A1 ACCELERATION SENSOR Public/Granted day:2009-04-23
Information query
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