Invention Grant
- Patent Title: Semiconductor device and method for forming the same
- Patent Title (中): 半导体装置及其形成方法
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Application No.: US12847974Application Date: 2010-07-30
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Publication No.: US08183633B2Publication Date: 2012-05-22
- Inventor: O-Kyun Kwon , Dong-Woo Suh , Jung-Hyung Pyo , Gyung-Ock Kim
- Applicant: O-Kyun Kwon , Dong-Woo Suh , Jung-Hyung Pyo , Gyung-Ock Kim
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: KR10-2007-0132314 20071217
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
Provided is a semiconductor and a method for forming the same. The method includes forming a buried insulating layer locally in a substrate. The substrate is etched to form an opening exposing the buried insulating layer, and a silicon pattern spaced in at least one direction from the substrate is formed on the buried insulating layer. A first insulating layer is formed to enclose the silicon pattern.
Public/Granted literature
- US20100301448A1 SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME Public/Granted day:2010-12-02
Information query
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