Invention Grant
US08188487B2 Surface emitting laser with trenches to define conductive regions
有权
具有沟槽的表面发射激光器以限定导电区域
- Patent Title: Surface emitting laser with trenches to define conductive regions
- Patent Title (中): 具有沟槽的表面发射激光器以限定导电区域
-
Application No.: US12837039Application Date: 2010-07-15
-
Publication No.: US08188487B2Publication Date: 2012-05-29
- Inventor: Mitsuhiro Ikuta
- Applicant: Mitsuhiro Ikuta
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2009-175390 20090728
- Main IPC: H01L29/26
- IPC: H01L29/26

Abstract:
A surface emitting laser includes a lower multilayer mirror, an active layer, and an upper multilayer mirror stacked onto a substrate. A first current confinement layer having a first electrically conductive region and a first insulating region is formed above or below the active layer using a first trench structure. A second current confinement layer having a second electrically conductive region and a second insulating region is formed above or below the first current confinement layer using a second trench structure. The first and second trench structures extend from a top surface of the upper multilayer mirror towards the substrate such that the second trench structure surrounds the first trench structure. When the surface emitting laser is viewed in an in-plane direction of the substrate, a boundary between the first electrically conductive region and the first insulating region is disposed inside the second electrically conductive region.
Public/Granted literature
- US20110027925A1 SURFACE EMITTING LASER, METHOD FOR PRODUCING SURFACE EMITTING LASER, AND IMAGE FORMING APPARATUS Public/Granted day:2011-02-03
Information query
IPC分类: