Invention Grant
- Patent Title: MOSFET with asymmetrical extension implant
- Patent Title (中): 具有不对称延伸植入物的MOSFET
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Application No.: US12904662Application Date: 2010-10-14
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Publication No.: US08193592B2Publication Date: 2012-06-05
- Inventor: Frank Bin Yang , Andrew M. Waite , Scott Luning
- Applicant: Frank Bin Yang , Andrew M. Waite , Scott Luning
- Applicant Address: US TX Austin
- Assignee: Advanced Micro Devices, Inc.
- Current Assignee: Advanced Micro Devices, Inc.
- Current Assignee Address: US TX Austin
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119

Abstract:
A method for fabricating a MOSFET (e.g., a PMOS FET) includes providing a semiconductor substrate having surface characterized by a (110) surface orientation or (110) sidewall surfaces, forming a gate structure on the surface, and forming a source extension and a drain extension in the semiconductor substrate asymmetrically positioned with respect to the gate structure. An ion implantation process is performed at a non-zero tilt angle. At least one spacer and the gate electrode mask a portion of the surface during the ion implantation process such that the source extension and drain extension are asymmetrically positioned with respect to the gate structure by an asymmetry measure.
Public/Granted literature
- US20110024841A1 MOSFET WITH ASYMMETRICAL EXTENSION IMPLANT Public/Granted day:2011-02-03
Information query
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