发明授权
- 专利标题： Sapphire substrates and methods of making same
- 专利标题（中）： 蓝宝石基板及其制造方法
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申请号： US11963454申请日： 2007-12-21
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公开(公告)号： US08197303B2公开(公告)日： 2012-06-12
- 发明人: Brahmanandam V. Tanikella , Palaniappan Chinnakaruppan , Robert A. Rizzuto , Isaac K. Cherian , Ramanujam Vedantham
- 申请人： Brahmanandam V. Tanikella , Palaniappan Chinnakaruppan , Robert A. Rizzuto , Isaac K. Cherian , Ramanujam Vedantham
- 申请人地址： US MA Worcester
- 专利权人： Saint-Gobain Ceramics & Plastics, Inc.
- 当前专利权人： Saint-Gobain Ceramics & Plastics, Inc.
- 当前专利权人地址： US MA Worcester
- 代理机构： Abel Law Group, LLP
- 代理商 Robert T. Conway
- 主分类号： B24B1/00
- IPC分类号： B24B1/00
摘要：
A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μm/cm2, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about 9.0 cm.
公开/授权文献
- US20080166951A1 SAPPHIRE SUBSTRATES AND METHODS OF MAKING SAME 公开/授权日：2008-07-10
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