Invention Grant
- Patent Title: Deposit morphology of electroplated copper
- Patent Title (中): 电镀铜的沉积形态
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Application No.: US12971367Application Date: 2010-12-17
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Publication No.: US08197662B1Publication Date: 2012-06-12
- Inventor: Eric Webb , Jonathan D. Reid , Yuichi Takada , Timothy Archer
- Applicant: Eric Webb , Jonathan D. Reid , Yuichi Takada , Timothy Archer
- Applicant Address: US CA San Jose
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D5/34
- IPC: C25D5/34

Abstract:
The present invention provides improved methods and devices for electroplating copper on a wafer. Some implementations of the present invention involve the pre-treatment of the wafer with a solution containing accelerator molecules. Preferably, the bath into which the wafer is subsequently placed for electroplating has a reduced concentration of accelerator molecules. The pre-treatment causes a reduction in roughness of the electroplated copper surface, particularly during the initial phases of copper growth.
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