Invention Grant
US08197662B1 Deposit morphology of electroplated copper 有权
电镀铜的沉积形态

Deposit morphology of electroplated copper
Abstract:
The present invention provides improved methods and devices for electroplating copper on a wafer. Some implementations of the present invention involve the pre-treatment of the wafer with a solution containing accelerator molecules. Preferably, the bath into which the wafer is subsequently placed for electroplating has a reduced concentration of accelerator molecules. The pre-treatment causes a reduction in roughness of the electroplated copper surface, particularly during the initial phases of copper growth.
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