发明授权
- 专利标题: Package structure having micro-electromechanical element and fabrication method thereof
- 专利标题(中): 具有微机电元件的封装结构及其制造方法
-
申请号: US12769041申请日: 2010-04-28
-
公开(公告)号: US08198689B2公开(公告)日: 2012-06-12
- 发明人: Chang-Yueh Chan , Chien-Ping Huang , Chun-Chi Ke , Chun-An Huang , Chih-Ming Huang
- 申请人: Chang-Yueh Chan , Chien-Ping Huang , Chun-Chi Ke , Chun-An Huang , Chih-Ming Huang
- 申请人地址: TW Taichung
- 专利权人: Siliconware Precision Industries Co., Ltd.
- 当前专利权人: Siliconware Precision Industries Co., Ltd.
- 当前专利权人地址: TW Taichung
- 代理机构: Edwards Wildman Palmer LLP
- 代理商 Peter F. Corless; Steven M. Jensen
- 优先权: TW98145250A 20091228
- 主分类号: H01L23/485
- IPC分类号: H01L23/485
摘要:
Proposed is a package structure having a micro-electromechanical (MEMS) element, including a chip having a plurality of electrical connecting pads and a MEMS element formed thereon; a lid disposed on the chip for covering the MEMS element; a stud bump disposed on each of the electrical connecting pads; an encapsulant formed on the chip with part of the stud bumps being exposed from the encapsulant; and a metal conductive layer formed on the encapsulant and connected to the stud bumps. The invention is characterized by completing the packaging process on the wafer directly to enable thinner and cheaper package structures to be fabricated within less time. This invention further provides a method for fabricating the package structure as described above.
公开/授权文献
信息查询
IPC分类: