发明授权
US08198957B2 Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
有权
微机电系统（MEMS）谐振器及其制造方法
- 专利标题： Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
- 专利标题（中）： 微机电系统（MEMS）谐振器及其制造方法
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申请号： US13270868申请日： 2011-10-11
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公开(公告)号： US08198957B2公开(公告)日： 2012-06-12
- 发明人: Shogo Inaba , Akira Sato
- 申请人： Shogo Inaba , Akira Sato
- 申请人地址： JP Tokyo
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Oliff & Berridge, PLC
- 优先权： JP2005-332444 20051117; JP2005-332445 20051117; JP2006-261135 20060926
- 主分类号： H03H9/00
- IPC分类号： H03H9/00 ; H03H3/007
摘要：
A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts on a gap between the fixed electrode and the movable electrode. An internal surface of a support beam of the movable electrode facing the fixed electrode has an inclined surface.
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