Invention Grant
- Patent Title: 3D memory array arranged for FN tunneling program and erase
- Patent Title (中): 3D存储阵列用于FN隧道编程和擦除
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Application No.: US12705158Application Date: 2010-02-12
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Publication No.: US08203187B2Publication Date: 2012-06-19
- Inventor: Hsiang-Lan Lung , Yen-Hao Shih , Erh-Kun Lai , Ming Hsiu Lee , Hang-Ting Lue
- Applicant: Hsiang-Lan Lung , Yen-Hao Shih , Erh-Kun Lai , Ming Hsiu Lee , Hang-Ting Lue
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
A 3D memory device includes an array of semiconductor body pillars and bit line pillars, dielectric charge trapping structures, and a plurality of levels of word line structures arranged orthogonally to the array of semiconductor body pillars and bit line pillars. The semiconductor body pillars have corresponding bit line pillars on opposing first and second sides, providing source and drain terminals. The semiconductor body pillars have first and second channel surfaces on opposing third and fourth sides. Dielectric charge trapping structures overlie the first and second channel surfaces, providing data storage sites on two sides of each semiconductor body pillar in each level of the 3D array. The device can be operated as a 3D AND-decoded flash memory.
Public/Granted literature
- US20100265773A1 3D MEMORY ARRAY ARRANGED FOR FN TUNNELING PROGRAM AND ERASE Public/Granted day:2010-10-21
Information query
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