发明授权
US08208296B2 Apparatus and method for extended nitride layer in a flash memory 有权
闪存中的延伸氮化物层的装置和方法

Apparatus and method for extended nitride layer in a flash memory
摘要:
A method and apparatus for storing information is provided. A core region of memory includes a semiconductor layer, at least one shallow trench, an insulator, and a charge-trapping layer. The semiconductor layer includes at least one source/drain region, and the insulator disposed above the source/drain region. The charge trapping layer is within the insulator, and the charge trapping layer is above the entire width of the source/drain region, and extends at least one angstrom beyond the width of the source/drain region, so that a portion the charge trapping layer extends into at least one shallow trench.
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