发明授权
- 专利标题: Test management system
- 专利标题(中): 测试管理系统
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申请号: US11963004申请日: 2007-12-21
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公开(公告)号: US08219349B1公开(公告)日: 2012-07-10
- 发明人: Yoram Schwarz , Yoshiki Ashizawa , Patrick Ngatchou , Heng-Cheng Pai
- 申请人: Yoram Schwarz , Yoshiki Ashizawa , Patrick Ngatchou , Heng-Cheng Pai
- 申请人地址: US CA San Jose
- 专利权人: Intermolecular, Inc.
- 当前专利权人: Intermolecular, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: G01R31/00
- IPC分类号: G01R31/00 ; G01R31/14 ; G01R31/26 ; G06F19/00 ; H01L21/66
摘要:
A test management system is provided that performs tests on integrated circuit test structures. A server may be used to distribute a test recipe to multiple test cells. Each test cell may have multiple test instruments and associated instrument drivers. When performing a test, a test type module may run on a given test cell. The test type module may perform tests by using the instrument drivers to control the test instruments available in the test cell. Users may make test option selections using graphical interface screens such as a test recipe setup screen and a platform engine control screen. A user can select test sites for testing based on which process parameters where used to fabricate the test structures associated with the test sites or other criteria.
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