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公开(公告)号：US08219349B1
公开(公告)日：2012-07-10
申请号：US11963004
申请日：2007-12-21
CPC分类号： H01L22/14 , G01R31/2851 , G01R31/2884 , H01L22/20 , H01L22/34 , H01L2924/0002 , H01L2924/00
摘要： A test management system is provided that performs tests on integrated circuit test structures. A server may be used to distribute a test recipe to multiple test cells. Each test cell may have multiple test instruments and associated instrument drivers. When performing a test, a test type module may run on a given test cell. The test type module may perform tests by using the instrument drivers to control the test instruments available in the test cell. Users may make test option selections using graphical interface screens such as a test recipe setup screen and a platform engine control screen. A user can select test sites for testing based on which process parameters where used to fabricate the test structures associated with the test sites or other criteria.
摘要翻译： 提供测试管理系统，对集成电路测试结构进行测试。 可以使用服务器将测试配方分发到多个测试单元。 每个测试单元可以具有多个测试仪器和相关的仪器驱动器。 执行测试时，测试类型模块可以在给定的测试单元上运行。 测试类型模块可以通过使用仪器驱动程序来控制测试单元中可用的测试仪器来执行测试。 用户可以使用诸如测试配方设置屏幕和平台引擎控制屏幕之类的图形界面屏幕进行测试选项选择。 用户可以根据哪些过程参数选择用于测试的测试站点，用于制造与测试站点相关的测试结构或其他标准。
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公开(公告)号：US08082045B1
公开(公告)日：2011-12-20
申请号：US11771836
申请日：2007-06-29
CPC分类号： G05B19/41865 , G05B2219/32008 , G05B2219/32096 , G05B2219/32097 , G05B2219/32098 , G05B2219/32128 , G05B2219/32244 , G05B2219/45031 , Y02P90/20
摘要： A method to graphically create a recipe for processing a substrate includes displaying graphical images that present processing operations to be performed on the substrate, allowing a user to set properties of the processing operations by manipulating the graphical images, and generating the recipe based on the properties of the processing operations set by the user and synchronizing the plurality of processing operations based on the properties. The graphical images may be time-bars in a Gantt-like chart that allows the user to see the sequence, the timing, and the durations of the processing operations.
摘要翻译： 用于图形地创建用于处理衬底的配方的方法包括显示呈现要在衬底上执行的处理操作的图形图像，允许用户通过操纵图形图像来设置处理操作的属性，并且基于属性生成配方 的用户设置的处理操作，并且基于属性同步多个处理操作。 图形图像可以是甘特图图表中的时间条，其允许用户查看处理操作的顺序，时序和持续时间。
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公开(公告)号：US20110264252A1
公开(公告)日：2011-10-27
申请号：US13174941
申请日：2011-07-01
申请人： Yoshiki Ashizawa , Heng-Cheng Pai
发明人： Yoshiki Ashizawa , Heng-Cheng Pai
IPC分类号： G06F19/00
CPC分类号： H01L22/20
摘要： A combinatorial processing management system is described, including determining an identification for a substrate, retrieving data from tools operating on the substrate, generating an analysis of the data in response to the retrieving, and storing the data and the analysis in a database indexed by the identification. The analysis may include comparisons between multiple processes performed on multiple regions of the substrate. The multiple processes may process at least one region of the substrate differently from at least one other region of the substrate.
摘要翻译： 描述了组合处理管理系统，包括确定衬底的标识，从在衬底上操作的工具检索数据，响应于检索生成对数据的分析，以及将数据和分析存储在由 识别。 分析可以包括在衬底的多个区域上执行的多个工艺之间的比较。 多个工艺可以处理与衬底的至少一个其它区域不同的衬底的至少一个区域。
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公开(公告)号：US08295969B2
公开(公告)日：2012-10-23
申请号：US13174941
申请日：2011-07-01
申请人： Yoshiki Ashizawa , Heng-Cheng Pai
发明人： Yoshiki Ashizawa , Heng-Cheng Pai
IPC分类号： G06F19/00
CPC分类号： H01L22/20
摘要： A combinatorial processing management system is described, including determining an identification for a substrate, retrieving data from tools operating on the substrate, generating an analysis of the data in response to the retrieving, and storing the data and the analysis in a database indexed by the identification. The analysis may include comparisons between multiple processes performed on multiple regions of the substrate. The multiple processes may process at least one region of the substrate differently from at least one other region of the substrate.
摘要翻译： 描述了组合处理管理系统，包括确定衬底的标识，从在衬底上操作的工具检索数据，响应于检索生成对数据的分析，以及将数据和分析存储在由 识别。 分析可以包括在衬底的多个区域上执行的多个工艺之间的比较。 多个工艺可以处理与衬底的至少一个其它区域不同的衬底的至少一个区域。
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