发明授权
- 专利标题: Method and apparatus for manufacturing magnetic recording media
- 专利标题(中): 制造磁记录介质的方法和装置
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申请号: US12829450申请日: 2010-07-02
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公开(公告)号: US08221637B2公开(公告)日: 2012-07-17
- 发明人: Yoshiyuki Kamata , Katsuyuki Naito , Akira Kikitsu , Masatoshi Sakurai , Masahiro Oka
- 申请人: Yoshiyuki Kamata , Katsuyuki Naito , Akira Kikitsu , Masatoshi Sakurai , Masahiro Oka
- 申请人地址: JP Tokyo JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba,Showa Denko K.K.
- 当前专利权人: Kabushiki Kaisha Toshiba,Showa Denko K.K.
- 当前专利权人地址: JP Tokyo JP Tokyo
- 代理机构: Pillsbury Winthrop Shaw Pittman, LLP
- 优先权: JP2005-188388 20050628
- 主分类号: C23C14/46
- IPC分类号: C23C14/46
摘要:
According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.
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