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公开(公告)号：US08221637B2
公开(公告)日：2012-07-17
申请号：US12829450
申请日：2010-07-02
IPC分类号： C23C14/46
CPC分类号： C23F4/00 , B82Y10/00 , G11B5/012 , G11B5/743 , G11B5/82 , G11B5/855 , H01J2237/30466 , H01J2237/3174
摘要： According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括将具有铁磁材料的突起和凹陷的图案形成在记录轨道部分和基板上的伺服部分上，形成平坦化膜，其顶表面高于 将铁磁材料的突出部分突出到铁磁材料上，并且对平坦化膜进行离子束蚀刻直到铁磁材料的突起的顶表面，并且基于变化确定平坦化蚀刻的终点 在通过以与角度为角度安装的离子计数器的入射颗粒的总数中; 相对于基板的垂直方向，根据平坦化膜的材料。
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公开(公告)号：US07771602B2
公开(公告)日：2010-08-10
申请号：US11475873
申请日：2006-06-28
CPC分类号： C23F4/00 , B82Y10/00 , G11B5/012 , G11B5/743 , G11B5/82 , G11B5/855 , H01J2237/30466 , H01J2237/3174
摘要： According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括将具有铁磁材料的突起和凹陷的图案形成在记录轨道部分和基板上的伺服部分上，形成平坦化膜，其顶表面高于 将铁磁材料的突出部分突出到铁磁材料上，并且对平坦化膜进行离子束蚀刻直到铁磁材料的突起的顶表面，并且基于变化确定平坦化蚀刻的终点 在通过以与角度为角度安装的离子计数器的入射颗粒的总数中; 相对于基板的垂直方向，根据平坦化膜的材料。
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3.发明授权Method for manufacturing substrate for discrete track recording media and method for manufacturing discrete track recording media 失效用于制造用于离散轨道记录介质的基板的方法和用于制造离散轨道记录介质的方法公开(公告)号：US07314833B2
公开(公告)日：2008-01-01
申请号：US11476038
申请日：2006-06-28
IPC分类号： H01L21/302
CPC分类号： G03F7/0002 , B08B7/0092 , B82Y10/00 , B82Y40/00 , G11B5/8404 , G11B5/855
摘要： According to one embodiment, a method for manufacturing a substrate for a discrete track recording media, the method includes forming an imprint resist layer on a substrate, imprinting, on the imprint resist layer, a stamper formed with patterns of protrusions and recesses corresponding to recording track zones and servo zones to transfer the patterns of protrusions and recesses to the imprint resist layer, removing the stamper from the imprint resist layer, and diffusing liquefied CO2 in a process chamber set at a pressure of 2 to 5 atm, diffusing liquefied H2O in the process chamber set at a pressure of 0.01 to 1 atm, or diffusing a reactive gas selected from a group consisting of liquefied CF4, CHF3, SF6, and C2F6 in the process chamber set at an arbitrary pressure, to jet spray the liquefied gas onto a surface of the substrate.
摘要翻译： 根据一个实施例，一种用于制造用于离散轨道记录介质的基板的方法，所述方法包括在基板上形成压印抗蚀剂层，在压印抗蚀剂层上压印形成有对应于记录的突起和凹部的图案的压模 轨道区域和伺服区域，以将突起和凹陷的图案转印到抗蚀剂层，从压印抗蚀剂层移除压模，并将液化CO 2扩散到设置在压力为2的处理室中 至5atm，在处理室中扩散液化H 2 O 2，压力为0.01至1atm，或扩散选自液化CF 4 >，CHF 3 3，SF 6 6和C 2 F 6 6在设置在任意压力下的处理室中 将液化气喷射到基板的表面上。
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公开(公告)号：US20070000861A1
公开(公告)日：2007-01-04
申请号：US11475873
申请日：2006-06-28
CPC分类号： C23F4/00 , B82Y10/00 , G11B5/012 , G11B5/743 , G11B5/82 , G11B5/855 , H01J2237/30466 , H01J2237/3174
摘要： According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括将具有铁磁材料的突起和凹陷的图案形成在记录轨道部分和基板上的伺服部分上，形成平坦化膜，其顶表面高于 将铁磁材料的突出部分突出到铁磁材料上，并且对平坦化膜进行离子束蚀刻直到铁磁材料的突起的顶表面，并且基于变化确定平坦化蚀刻的终点 在通过离子计数器安装的入射颗粒的总数中，根据平坦化膜的材料相对于垂直于衬底的方向成角度θ。
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5.发明申请Method for manufacturing substrate for discrete track recording media and method for manufacturing discrete track recording media 失效用于制造离散轨道记录介质的基板的方法和用于制造离散轨道记录介质的方法公开(公告)号：US20070001331A1
公开(公告)日：2007-01-04
申请号：US11476038
申请日：2006-06-28
IPC分类号： B29C45/76
CPC分类号： G03F7/0002 , B08B7/0092 , B82Y10/00 , B82Y40/00 , G11B5/8404 , G11B5/855
摘要： According to one embodiment, a method for manufacturing a substrate for a discrete track recording media, the method includes forming an imprint resist layer on a substrate, imprinting, on the imprint resist layer, a stamper formed with patterns of protrusions and recesses corresponding to recording track zones and servo zones to transfer the patterns of protrusions and recesses to the imprint resist layer, removing the stamper from the imprint resist layer, and diffusing liquefied CO2 in a process chamber set at a pressure of 2 to 5 atm, diffusing liquefied H2O in the process chamber set at a pressure of 0.01 to 1 atm, or diffusing a reactive gas selected from a group consisting of liquefied CF4, CHF3, SF6, and C2F6 in the process chamber set at an arbitrary pressure, to jet spray the liquefied gas onto a surface of the substrate.
摘要翻译： 根据一个实施例，一种用于制造用于离散轨道记录介质的基板的方法，所述方法包括在基板上形成压印抗蚀剂层，在压印抗蚀剂层上压印形成有对应于记录的突起和凹部的图案的压模 轨道区域和伺服区域，以将突起和凹陷的图案转印到抗蚀剂层，从压印抗蚀剂层移除压模，并将液化CO 2扩散到设置在压力为2的处理室中 至5atm，在处理室中扩散液化H 2 O 2，压力为0.01至1atm，或扩散选自液化CF 4 >，CHF 3 3，SF 6 6和C 2 F 6 6在设置在任意压力下的处理室中 将液化气喷射到基板的表面上。
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公开(公告)号：US20100264019A1
公开(公告)日：2010-10-21
申请号：US12829450
申请日：2010-07-02
IPC分类号： C23C14/46
CPC分类号： C23F4/00 , B82Y10/00 , G11B5/012 , G11B5/743 , G11B5/82 , G11B5/855 , H01J2237/30466 , H01J2237/3174
摘要： According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括将具有铁磁材料的突起和凹陷的图案形成在记录轨道部分和基板上的伺服部分上，形成平坦化膜，其顶表面高于 将铁磁材料的突出部分突出到铁磁材料上，并且对平坦化膜进行离子束蚀刻直到铁磁材料的突起的顶表面，并且基于变化确定平坦化蚀刻的终点 在通过以与角度为角度安装的离子计数器的入射颗粒的总数中; 相对于基板的垂直方向，根据平坦化膜的材料。
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7.发明授权公开(公告)号：US07635529B2
公开(公告)日：2009-12-22
申请号：US11475862
申请日：2006-06-28
申请人： Katsuyuki Naito , Masatoshi Sakurai , Akira Kikitsu , Yoshiyuki Kamata , Naoko Kihara , Masahiro Oka
发明人： Katsuyuki Naito , Masatoshi Sakurai , Akira Kikitsu , Yoshiyuki Kamata , Naoko Kihara , Masahiro Oka
CPC分类号： G11B5/7315
摘要： According to one embodiment, a substrate for a magnetic recording media has circumferential protrusions corresponding to recording tracks and circumferential recesses corresponding to grooves between the recording tracks, in which the substrate satisfying at least one of conditions of (a) a surface of the recess has a surface energy smaller than that of the protrusion, (b) the surface of the recess is modified with a thermally decomposable or deformable substance, (c) the surface of the recess has surface roughness smaller than that of the protrusion, (d) crystal orientation is more disturbed on the surface of the recess than on the protrusion, (e) the surface of the recess is modified with a substance that causes reaction with a magnetic material or that diffuses into the magnetic material, and (f) the surface of the recess is modified with a substance soluble in a solvent or with a deformable substance.
摘要翻译： 根据一个实施例，用于磁记录介质的基底具有对应于记录轨迹的周向突起和对应于记录轨道之间的凹槽的周向凹部，其中满足以下条件中的至少一个的基底：（a）凹部的表面具有 表面能小于突起的表面能，（b）凹部的表面用可热分解或可变形的物质进行改性，（c）凹陷表面的表面粗糙度小于突起的表面粗糙度，（d）晶体 在凹部的表面上比在突起上的取向更加干扰，（e）凹部的表面用引起与磁性材料反应或扩散到磁性材料中的物质进行改性，和（f） 该凹部用可溶于溶剂或可变形物质的物质进行改性。
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8.发明申请公开(公告)号：US20070003798A1
公开(公告)日：2007-01-04
申请号：US11475862
申请日：2006-06-28
申请人： Katsuyuki Naito , Masatoshi Sakurai , Akira Kikitsu , Yoshiyuki Kamata , Naoko Kihara , Masahiro Oka
发明人： Katsuyuki Naito , Masatoshi Sakurai , Akira Kikitsu , Yoshiyuki Kamata , Naoko Kihara , Masahiro Oka
IPC分类号： G11B5/706
CPC分类号： G11B5/7315
摘要： According to one embodiment, a substrate for a magnetic recording media has circumferential protrusions corresponding to recording tracks and circumferential recesses corresponding to grooves between the recording tracks, in which the substrate satisfying at least one of conditions of (a) a surface of the recess has a surface energy smaller than that of the protrusion, (b) the surface of the recess is modified with a thermally decomposable or deformable substance, (c) the surface of the recess has surface roughness smaller than that of the protrusion, (d) crystal orientation is more disturbed on the surface of the recess than on the protrusion, (e) the surface of the recess is modified with a substance that causes reaction with a magnetic material or that diffuses into the magnetic material, and (f) the surface of the recess is modified with a substance soluble in a solvent or with a deformable substance.
摘要翻译： 根据一个实施例，用于磁记录介质的基底具有对应于记录轨迹的周向突起和对应于记录轨道之间的凹槽的周向凹部，其中满足以下条件中的至少一个的基底：（a）凹部的表面具有 表面能小于突起的表面能，（b）凹部的表面用可热分解或可变形的物质进行改性，（c）凹陷表面的表面粗糙度小于突起的表面粗糙度，（d）晶体 在凹部的表面上比在突起上的取向更加干扰，（e）凹部的表面用引起与磁性材料反应或扩散到磁性材料中的物质进行改性，和（f） 该凹部用可溶于溶剂或可变形物质的物质进行改性。
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公开(公告)号：US08153205B2
公开(公告)日：2012-04-10
申请号：US12713022
申请日：2010-02-25
IPC分类号： C08F2/48
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a patterned medium includes depositing a magnetic recording layer and applying an ultraviolet curable resin on both surfaces of a medium substrate, pressing a first resin stamper and a second resin stamper each including patterns of recesses and protrusions, corresponding to a patterned medium, against both surfaces of the medium substrate in such a manner that a direction from a center of the medium substrate toward a center of the first resin stamper is off-oriented from a direction from the center of the medium substrate toward a center of the second resin stamper to imprint the patterns of recesses and protrusions on the ultraviolet curable resin, and irradiating the ultraviolet curable resin with an ultraviolet ray through each of the first and second resin stampers to cure the ultraviolet curable resin.
摘要翻译： 根据一个实施例，一种制造图案化介质的方法包括沉积磁记录层并在介质基板的两个表面上施加紫外线固化树脂，压制每个包括凹凸图案的第一树脂压模和第二树脂压模， 对应于图案化的介质，以介质基板的中心朝向第一树脂压模的中心的方向从介质基板的中心朝向 所述第二树脂压模的中心在所述紫外线固化树脂上印刷凹凸图案，并且通过所述第一和第二树脂印模机中的每一个照射所述紫外线固化树脂以固化所述紫外线固化树脂。
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10.发明授权Substrate for magnetic recording medium, magnetic recording medium, and magnetic recording apparatus 有权用于磁记录介质的基板，磁记录介质和磁记录装置公开(公告)号：US08059368B2
公开(公告)日：2011-11-15
申请号：US12801299
申请日：2010-06-02
申请人： Kaori Kimura , Masatoshi Sakurai , Akira Kikitsu , Yoshiyuki Kamata , Satoshi Shirotori , Hiroyuki Hieda
发明人： Kaori Kimura , Masatoshi Sakurai , Akira Kikitsu , Yoshiyuki Kamata , Satoshi Shirotori , Hiroyuki Hieda
IPC分类号： G11B5/82
摘要： It is possible to improve the recording and reproducing S/N ratio, the reproduction signal intensity, and the degree of high density recording. There are provided a plurality of recording tracks formed on a substrate, each recording track being formed of a magnetic material, and non-recording sections formed on the substrate, each non-recording section separating adjacent recording tracks, each recording track including a plurality of recording sections and connecting sections for connecting the recording sections adjacent thereto in a track longitudinal direction, and each connecting section having a cross-sectional area in a track width direction that is smaller than a cross-sectional area in a track width direction of adjacent recording sections.
摘要翻译： 可以改善记录和再现S / N比，再现信号强度和高密度记录程度。 提供了形成在基板上的多个记录轨道，每个记录磁道由磁性材料形成，而非记录部分形成在基板上，每个非记录部分分隔相邻的记录磁道，每个记录磁道包括多个 记录部分和连接部分，用于在轨道纵向方向上连接与其相邻的记录部分，并且每个连接部分在轨道宽度方向上的横截面积小于相邻记录的轨道宽度方向上的横截面积 部分。
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