发明授权
- 专利标题： Method for making thermoacoustic device
- 专利标题（中）： 制作热声装置的方法
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申请号： US12756032申请日： 2010-04-07
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公开(公告)号： US08225501B2公开(公告)日： 2012-07-24
- 发明人: Liang Liu , Zhuo Chen , Kai Liu , Chen Feng , Kai-Li Jiang , Shou-Shan Fan
- 申请人： Liang Liu , Zhuo Chen , Kai Liu , Chen Feng , Kai-Li Jiang , Shou-Shan Fan
- 申请人地址： CN Beijing TW Tu-Cheng, New Taipei
- 专利权人： Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- 当前专利权人： Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- 当前专利权人地址： CN Beijing TW Tu-Cheng, New Taipei
- 代理机构： Altis Law Group, Inc.
- 优先权： CN200910109570 20090807
- 主分类号： H05K3/02
- IPC分类号： H05K3/02 ; H05K3/10
摘要：
The present invention relates to a method for making a thermoacoustic device. The method includes the following steps. A substrate with a surface is provided. A plurality of microspaces is formed on the surface of the substrate. A sacrifice layer is fabricated to fill the microspaces. A metal film is deposited on the sacrifice layer, and the sacrifice layer is removed. A signal input device is provided to electrically connect with the metal film.
公开/授权文献
- US20110031218A1 METHOD FOR MAKING THERMOACOUSTIC DEVICE 公开/授权日：2011-02-10