发明授权
US08227277B2 Group-III nitride semiconductor laser device, and method of fabricating group-III nitride semiconductor laser device
有权
III族氮化物半导体激光器件,以及III族氮化物半导体激光器件的制造方法
- 专利标题: Group-III nitride semiconductor laser device, and method of fabricating group-III nitride semiconductor laser device
- 专利标题(中): III族氮化物半导体激光器件,以及III族氮化物半导体激光器件的制造方法
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申请号: US13277806申请日: 2011-10-20
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公开(公告)号: US08227277B2公开(公告)日: 2012-07-24
- 发明人: Yusuke Yoshizumi , Yohei Enya , Takashi Kyono , Masahiro Adachi , Katsushi Akita , Masaki Ueno , Takamichi Sumitomo , Shinji Tokuyama , Koji Katayama , Takao Nakamura , Takatoshi Ikegami
- 申请人: Yusuke Yoshizumi , Yohei Enya , Takashi Kyono , Masahiro Adachi , Katsushi Akita , Masaki Ueno , Takamichi Sumitomo , Shinji Tokuyama , Koji Katayama , Takao Nakamura , Takatoshi Ikegami
- 申请人地址: JP Osaka-shi
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JP Osaka-shi
- 代理机构: Venable LLP
- 代理商 Michael A. Sartori
- 优先权: JP2009-209619 20090910
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A method of fabricating a group-III nitride semiconductor laser device includes: preparing a substrate of a hexagonal group-III nitride semiconductor, where the substrate has a semipolar primary surface; forming a substrate product having a laser structure, an anode electrode and a cathode electrode, where the laser structure includes the substrate and a semiconductor region, and where the semiconductor region is formed on the semipolar primary surface; scribing a first surface of the substrate product in part in a direction of the a-axis of the hexagonal group-III nitride semiconductor; and carrying out breakup of the substrate product by press against a second surface of the substrate product, to form another substrate product and a laser bar.
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