发明授权
US08227277B2 Group-III nitride semiconductor laser device, and method of fabricating group-III nitride semiconductor laser device 有权
III族氮化物半导体激光器件,以及III族氮化物半导体激光器件的制造方法

Group-III nitride semiconductor laser device, and method of fabricating group-III nitride semiconductor laser device
摘要:
A method of fabricating a group-III nitride semiconductor laser device includes: preparing a substrate of a hexagonal group-III nitride semiconductor, where the substrate has a semipolar primary surface; forming a substrate product having a laser structure, an anode electrode and a cathode electrode, where the laser structure includes the substrate and a semiconductor region, and where the semiconductor region is formed on the semipolar primary surface; scribing a first surface of the substrate product in part in a direction of the a-axis of the hexagonal group-III nitride semiconductor; and carrying out breakup of the substrate product by press against a second surface of the substrate product, to form another substrate product and a laser bar.
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