发明授权
US08227849B2 Method and structure for creation of a metal insulator metal capacitor
有权
制造金属绝缘子金属电容器的方法和结构
- 专利标题： Method and structure for creation of a metal insulator metal capacitor
- 专利标题（中）： 制造金属绝缘子金属电容器的方法和结构
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申请号： US12706834申请日： 2010-02-17
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公开(公告)号： US08227849B2公开(公告)日： 2012-07-24
- 发明人: Ebenezer E Eshun , Ronald J Bolam , Douglas D Coolbaugh , Keith E Downes , Natalie B Feilchenfeld , Zhong-Xiang He
- 申请人： Ebenezer E Eshun , Ronald J Bolam , Douglas D Coolbaugh , Keith E Downes , Natalie B Feilchenfeld , Zhong-Xiang He
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理商 Katherine S. Brown
- 主分类号： H01L29/92
- IPC分类号： H01L29/92
摘要：
The invention is directed to an improved capacitor that reduces edge defects and prevents yield failures. A first embodiment of the invention comprises a protective layer adjacent an interface of a conductive layer with the insulator, while the second embodiment of the invention comprises a protective layer on an insulator which is on a conductive layer.
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