Invention Grant
- Patent Title: Increasing the surface area of a memory cell capacitor
- Patent Title (中): 增加存储单元电容器的表面积
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Application No.: US12749389Application Date: 2010-03-29
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Publication No.: US08232588B2Publication Date: 2012-07-31
- Inventor: Brian S. Doyle , Robert S. Chau , Vivek De , Suman Datta , Dinesh Somasekhar
- Applicant: Brian S. Doyle , Robert S. Chau , Vivek De , Suman Datta , Dinesh Somasekhar
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/94

Abstract:
Methods and apparatuses to increase a surface area of a memory cell capacitor are described. An opening in a second insulating layer deposited over a first insulating layer on a substrate is formed. The substrate has a fin. A first insulating layer is deposited over the substrate adjacent to the fin. The opening in the second insulating layer is formed over the fin. A first conducting layer is deposited over the second insulating layer and the fin. A third insulating layer is deposited on the first conducting layer. A second conducting layer is deposited on the third insulating layer. The second conducting layer fills the opening. The second conducting layer is to provide an interconnect to an upper metal layer. Portions of the second conducting layer, third insulating layer, and the first conducting layer are removed from a top surface of the second insulating layer.
Public/Granted literature
- US20100181607A1 INCREASING THE SURFACE AREA OF A MEMORY CELL CAPACITOR Public/Granted day:2010-07-22
Information query
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