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US08241081B2 Method for making field emission cathode device 有权
场致发射阴极器件的制造方法

Method for making field emission cathode device
摘要:
A method for making a field emission cathode device is presented. First, an insulative substrate is provided. The insulative substrate includes a first surface and a second surface opposite to the first surface. The insulative substrate defines a number of openings extending through from the first surface to the second surface. Second, at least one electron emitter is provided corresponding to each of the number of openings. The electron emitter includes a fixing portion and an electron emission portion connecting to the fixing portion. The fixing portion is fixed on the first surface, and the electron emission portion extends from the fixing portion into the number of openings. Third, a number of cathode electrodes are formed on the first surface to fix the fixing portion between the insulative substrate and the cathode electrodes.
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