发明授权
US08241829B2 Resist polymer, resist composition, process for pattern formation, and starting compounds for production of the resist polymer
有权
抗蚀剂聚合物,抗蚀剂组合物,图案形成方法和用于生产抗蚀剂聚合物的起始化合物
- 专利标题: Resist polymer, resist composition, process for pattern formation, and starting compounds for production of the resist polymer
- 专利标题(中): 抗蚀剂聚合物,抗蚀剂组合物,图案形成方法和用于生产抗蚀剂聚合物的起始化合物
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申请号: US10592057申请日: 2005-03-08
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公开(公告)号: US08241829B2公开(公告)日: 2012-08-14
- 发明人: Hikaru Momose , Atsushi Ootake , Tadashi Nakamura , Akifumi Ueda
- 申请人: Hikaru Momose , Atsushi Ootake , Tadashi Nakamura , Akifumi Ueda
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Rayon Co., Ltd.
- 当前专利权人: Mitsubishi Rayon Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2004-063616 20040308; JP2004-073183 20040315; JP2004-189889 20040628; JP2004-220036 20040728; JP2004-253002 20040831; JP2004-376738 20041227; JP2005-004315 20050111
- 国际申请: PCT/JP2005/004402 WO 20050308
- 国际公布: WO2005/085301 WO 20050915
- 主分类号: G03F7/039
- IPC分类号: G03F7/039 ; G03F7/20 ; G03F7/30
摘要:
To provide a resist polymer comprising, as a structural unit, an acid-decomposable unit having a structure represented by formula (1) or (2) which exhibits a small line edge roughness and produces little defects in DUV excimer laser lithography or the like. In formulas (1) and (2), n represents an integer of 2 to 24; J represents a single bond or a divalent hydrocarbon group which may have a substituent/heteroatom when n=2, or represents an n-valent hydrocarbon group which may have a substituent/heteroatom when n≧3; E represents a residue of a polymerization terminator, a chain transfer agent or a polymerization initiator; K1 and K2 each represent at least one selected from alkylene, cycloalkylene, oxyalkylene, arylene, a divalent thiazoline ring, a divalent oxazoline ring and a divalent imidazoline ring; L1 and L2 each represent at least one selected from —C(O)O—, —C(O)— and —OC(O)—; M1, M2 and M3 each represent at least one selected from alkylene, cycloalkylene, oxyalkylene and arylene; Y, Y1 and Y2 each represent an acid-decomposable linkage; k1, k2, l1, l2, m1, m2, m3 and n1 each represent 0 or 1; and R1 represents H or a methyl group.
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