Invention Grant
US08245571B2 Component and production method for a component 有权
组件的组件和生产方法

Component and production method for a component
Abstract:
A component having an acceleration sensor having at least one freely oscillatory mass, and a resonator having at least one resonating structure, in which the at least one freely oscillatory mass of the acceleration sensor and the at least one resonating structure of the resonator are disposed on and/or in one chip. A corresponding production method for a component is also described.
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