发明授权
US08247617B2 Group 2 metal precursors for depositing multi-component metal oxide films
有权
用于沉积多组分金属氧化物膜的第2族金属前体
- 专利标题： Group 2 metal precursors for depositing multi-component metal oxide films
- 专利标题（中）： 用于沉积多组分金属氧化物膜的第2族金属前体
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申请号： US12266058申请日： 2008-11-06
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公开(公告)号： US08247617B2公开(公告)日： 2012-08-21
- 发明人: Xinjian Lei , Liam J. Quinn , Daniel P. Spence
- 申请人： Xinjian Lei , Liam J. Quinn , Daniel P. Spence
- 申请人地址： US PA Allentown
- 专利权人： Air Products and Chemicals, Inc.
- 当前专利权人： Air Products and Chemicals, Inc.
- 当前专利权人地址： US PA Allentown
- 代理商 Joseph D. Rossi
- 主分类号： C07C49/00
- IPC分类号： C07C49/00 ; C07F5/00 ; C07F5/06
摘要：
Novel Sr and Ba complexes containing both beta-diketonates and N-methyl-pyrrolidone were synthesized and characterized. TGA experiments indicated these complexes are volatile, they can be employed as precursors for ALD strontium titanate (STO) or barium strontium titanate films (BST) films in semiconductor fabrication.