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US08247847B2 Solid-state imaging device and manufacturing method therefor 失效
固态成像装置及其制造方法

Solid-state imaging device and manufacturing method therefor
Abstract:
A solid-state imaging device including a first transfer electrode portion and a second transfer electrode portion having a pattern area ratio higher than that of the first transfer electrode portion. The first transfer electrode portion includes a plurality of first transfer electrodes having a single-layer structure of metal material. The second transfer electrode portion includes a plurality of second transfer electrodes having a single-layer structure of polycrystalline silicon or amorphous silicon.
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