发明授权
US08252626B2 Thin film transistor array panel and manufacturing method thereof 有权
薄膜晶体管阵列面板及其制造方法

Thin film transistor array panel and manufacturing method thereof
摘要:
A manufacturing method for a thin film transistor array panel including forming a gate electrode, forming an insulating layer on the gate electrode, sequentially forming a lower conducting layer and a upper conducting layer on the insulating layer, etching the upper conducting layer to form a first source electrode and a first drain electrode, etching the lower conducting layer to form the second source electrode and the second drain electrode, over-etching the second source electrode and the second drain electrode, and forming an organic semiconductor between the second source electrode and the second drain electrode.
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