Invention Grant
- Patent Title: Inspection method and inspection apparatus
- Patent Title (中): 检验方法和检验仪器
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Application No.: US13347245Application Date: 2012-01-10
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Publication No.: US08269959B2Publication Date: 2012-09-18
- Inventor: Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
- Applicant: Akira Hamamatsu , Minori Noguchi , Hidetoshi Nishiyama , Yoshimasa Ohshima , Takahiro Jingu , Sachio Uto
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2002-347134 20021129
- Main IPC: G01N21/00
- IPC: G01N21/00
Abstract:
The present invention provides an inspection apparatus and inspection method. The inspection apparatus includes a stage mechanism for supporting an object under inspection. A spatial filter is provided in the detection optical system to inspect the object. A printer is used to print the results of the spatial filter. The spatial filter can be provided in the form of a Fourier transformed image.
Public/Granted literature
- US20120133929A1 INSPECTION METHOD AND INSPECTION APPARATUS Public/Granted day:2012-05-31
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