Invention Grant
- Patent Title: Automated model building and model updating
- Patent Title (中): 自动模型建立和模型更新
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Application No.: US12113613Application Date: 2008-05-01
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Publication No.: US08271103B2Publication Date: 2012-09-18
- Inventor: Lawrence Hendler , Stela Diamant Lazarovich , Ron Hadar , Nouna Kettaneh , Uzi Levami , Dmitry Perlroizen
- Applicant: Lawrence Hendler , Stela Diamant Lazarovich , Ron Hadar , Nouna Kettaneh , Uzi Levami , Dmitry Perlroizen
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Proskauer Rose LLP
- Main IPC: G05B13/02
- IPC: G05B13/02 ; G06F19/00 ; G06F17/18 ; G06F11/30 ; G06F7/00

Abstract:
A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.
Public/Granted literature
- US20090037013A1 Automated Model Building and Model Updating Public/Granted day:2009-02-05
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