公开(公告)号：US20090037013A1

公开(公告)日：2009-02-05

申请号：US12113613

申请日：2008-05-01

Applicant: Lawrence Hendler ,  Stela Diamant Lazarovich ,  Ron Hadar ,  Nouna Kettaneh ,  Uzi Levami ,  Dmitry Perlroizen

Inventor： Lawrence Hendler ,  Stela Diamant Lazarovich ,  Ron Hadar ,  Nouna Kettaneh ,  Uzi Levami ,  Dmitry Perlroizen

IPC: G06F19/00

CPC classification number: G05B19/41875 ,  G05B2219/32201 ,  G05B2219/42001 ,  G05B2219/45031

Abstract: A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.

Abstract translation: 描述了用于创建新模型或基于模板更新先前创建的模型的系统和计算机实现的方法。 从先前创建的模型生成模板。 先前创建的模型指定与制造过程，过程工具或室相关联的一组参数。 获取，监测和分析与制造过程相关的变量。 采用统计分析（或多变量统计分析）来分析监测变量和参数集。 当任何受监视的变量满足阈值条件时，将根据模板和监视变量创建新模型或先前创建的模型的参数进行更新，调整或修改。 还描述了便于用户和系统之间的通信以及信息显示的用户界面。

公开(公告)号：US08271103B2

公开(公告)日：2012-09-18

申请号：US12113613

申请日：2008-05-01

Applicant: Lawrence Hendler ,  Stela Diamant Lazarovich ,  Ron Hadar ,  Nouna Kettaneh ,  Uzi Levami ,  Dmitry Perlroizen

Inventor： Lawrence Hendler ,  Stela Diamant Lazarovich ,  Ron Hadar ,  Nouna Kettaneh ,  Uzi Levami ,  Dmitry Perlroizen

IPC: G05B13/02 ,  G06F19/00 ,  G06F17/18 ,  G06F11/30 ,  G06F7/00

CPC classification number: G05B19/41875 ,  G05B2219/32201 ,  G05B2219/42001 ,  G05B2219/45031

Abstract: A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.

Abstract translation: 描述了用于创建新模型或基于模板更新先前创建的模型的系统和计算机实现的方法。 从先前创建的模型生成模板。 先前创建的模型指定与制造过程，过程工具或室相关联的一组参数。 获取，监测和分析与制造过程相关的变量。 采用统计分析（或多变量统计分析）来分析监测变量和参数集。 当任何受监视的变量满足阈值条件时，将根据模板和监视变量创建新模型或先前创建的模型的参数进行更新，调整或修改。 还描述了便于用户和系统之间的通信以及信息显示的用户界面。

公开(公告)号：US20120303142A1

公开(公告)日：2012-11-29

申请号：US13568881

申请日：2012-08-07

Applicant: Lawrence Hendler ,  Stela Diamant Lazarovich ,  Ron Hadar ,  Nouna Kettaneh ,  Uzi Levami ,  Dmitry Perlroizen

Inventor： Lawrence Hendler ,  Stela Diamant Lazarovich ,  Ron Hadar ,  Nouna Kettaneh ,  Uzi Levami ,  Dmitry Perlroizen

IPC: G05B13/04

CPC classification number: G05B19/41875 ,  G05B2219/32201 ,  G05B2219/42001 ,  G05B2219/45031

Abstract: A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.

Abstract translation: 描述了用于创建新模型或基于模板更新先前创建的模型的系统和计算机实现的方法。 从先前创建的模型生成模板。 先前创建的模型指定与制造过程，过程工具或室相关联的一组参数。 获取，监测和分析与制造过程相关的变量。 采用统计分析（或多变量统计分析）来分析监测变量和参数集。 当任何受监视的变量满足阈值条件时，将根据模板和监视变量创建新模型或先前创建的模型的参数进行更新，调整或修改。 还描述了便于用户和系统之间的通信以及信息显示的用户界面。