发明授权
- 专利标题: Method for producing electric contacts on a semiconductor component
- 专利标题(中): 在半导体部件上制造电触点的方法
-
申请号: US12781032申请日: 2010-05-17
-
公开(公告)号: US08273596B2公开(公告)日: 2012-09-25
- 发明人: Henning Nagel , Wilfried Schmidt , Ingo Schwirtlich , Dieter Franke
- 申请人: Henning Nagel , Wilfried Schmidt , Ingo Schwirtlich , Dieter Franke
- 申请人地址: DE Mainz
- 专利权人: Schott Solar AG
- 当前专利权人: Schott Solar AG
- 当前专利权人地址: DE Mainz
- 代理机构: Dennison, Schultz & MacDonald
- 优先权: DE102009025845 20090519; DE102009043916 20090901
- 主分类号: H01L21/70
- IPC分类号: H01L21/70 ; H01L31/18
摘要:
Process for producing strip-shaped and/or point-shaped electrically conducting contacts on a semiconductor component like a solar cell, includes the steps of applying a moist material forming the contacts in a desired striplike and/or point-like arrangement on at least one exterior surface of the semiconductor component; drying the moist material by heating the semiconductor component to a temperature T1 and keeping the semiconductor element at temperature T1 over a time t1; sintering the dried material by heating the semiconductor component to a temperature T2 and keeping the semiconductor component at temperature T2 over a time t2; cooling the semiconductor component to a temperature T3 that is equal or roughly equal to room temperature, and keeping the semiconductor component at temperature T3 over a time T3; cooling the semiconductor component to a temperature T4 with T4≦−35° C. and keeping the semiconductor component at temperature T4 over a time T4; and heating the semiconductor component to room temperature.
公开/授权文献
信息查询
IPC分类: