Invention Grant
US08273598B2 Method for forming a self-aligned bit line for PCRAM and self-aligned etch back process
有权
用于形成PCRAM和自对准回蚀工艺的自对准位线的方法
- Patent Title: Method for forming a self-aligned bit line for PCRAM and self-aligned etch back process
- Patent Title (中): 用于形成PCRAM和自对准回蚀工艺的自对准位线的方法
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Application No.: US13020051Application Date: 2011-02-03
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Publication No.: US08273598B2Publication Date: 2012-09-25
- Inventor: Matthew J. Breitwisch , Chieh-Fang Chen , Shih-Hung Chen , Eric A. Joseph , Chung Hon Lam , Michael F. Lofaro , Hsiang-Lan Lung , Alejandro G. Schrott , Min Yang
- Applicant: Matthew J. Breitwisch , Chieh-Fang Chen , Shih-Hung Chen , Eric A. Joseph , Chung Hon Lam , Michael F. Lofaro , Hsiang-Lan Lung , Alejandro G. Schrott , Min Yang
- Applicant Address: US NY Armonk TW Hsinchu
- Assignee: International Business Machines Corporation,Macronix International Co., Ltd.
- Current Assignee: International Business Machines Corporation,Macronix International Co., Ltd.
- Current Assignee Address: US NY Armonk TW Hsinchu
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Vazken Alexanian, Esq.
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of forming bit line aligned to a phase change material that includes forming a pedestal of a sacrificial material on a portion of a lower electrode and forming at least one dielectric material adjacent to the sacrificial material, wherein the at least one dielectric material has an upper surface substantially coplanar with an upper surface of the pedestal of the sacrificial material. The pedestal of the sacrificial material is removed selective to the at least one dielectric material and the lower electrode to provide an opening to an exposed surface of the lower electrode. A phase change material is formed on the exposed surface of the lower electrode, and the opening is filled with a conductive fill material. A self-aligned etch back process is also provided.
Public/Granted literature
- US20120202333A1 METHOD FOR FORMING A SELF-ALIGNED BIT LINE FOR PCRAM AND SELF-ALIGNED ETCH BACK PROCESS Public/Granted day:2012-08-09
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