A hybrid self-test circuit structure comprises a plurality of input terminals and a plurality of output terminals for testing a plurality of memory units. The circuit structure comprises a first level functional unit for driving a plurality of first output terminals electrically coupled to the first level functional unit to output an output signal according to an external control signal transmitted from the outside; a plurality of second level functional units for receiving the output signal and generating a test signal according to the output signal and outputting the test signal to the memory units; a parallel interface parallelly installed between the first level functional unit and at least one of the second level functional units; and a serial interface serially installed between the first level functional unit and at least one of the second level functional units.