发明授权
- 专利标题: Semiconductor device and method of using leadframe bodies to form openings through encapsulant for vertical interconnect of semiconductor die
- 专利标题(中): 使用引线框体通过半导体芯片垂直互连的密封剂形成开口的半导体器件和方法
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申请号: US13153286申请日: 2011-06-03
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公开(公告)号: US08288209B1公开(公告)日: 2012-10-16
- 发明人: HeeJo Chi , NamJu Cho , HanGil Shin
- 申请人: HeeJo Chi , NamJu Cho , HanGil Shin
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC, Ltd.
- 当前专利权人: STATS ChipPAC, Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group: Atkins & Associates, P.C.
- 代理商 Robert D. Atkins
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A semiconductor device has a leadframe with a plurality of bodies extending from the base plate. A first semiconductor die is mounted to the base plate of the leadframe between the bodies. An encapsulant is deposited over the first semiconductor die and base plate and around the bodies of the leadframe. A portion of the encapsulant over the bodies of the leadframe is removed to form first openings in the encapsulant that expose the bodies. An interconnect structure is formed over the encapsulant and extending into the first openings to the bodies of the leadframe. The leadframe and bodies are removed to form second openings in the encapsulant corresponding to space previously occupied by the bodies to expose the interconnect structure. A second semiconductor die is mounted over the first semiconductor die with bumps extending into the second openings of the encapsulant to electrically connect to the interconnect structure.
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