发明授权
- 专利标题: Method for measuring a spectrum of a narrowband light source, and spectrometer arrangement
- 专利标题(中): 用于测量窄带光源的光谱的方法和光谱仪布置
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申请号: US12558874申请日: 2009-09-14
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公开(公告)号: US08289520B2公开(公告)日: 2012-10-16
- 发明人: Johannes Kraus , Alois Herkommer , Bernhard Weigl , Michel Le Maire , Holger Muenz
- 申请人: Johannes Kraus , Alois Herkommer , Bernhard Weigl , Michel Le Maire , Holger Muenz
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss Laser Optics GmbH
- 当前专利权人: Carl Zeiss Laser Optics GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 优先权: DE102008050867 20080930
- 主分类号: G01J3/45
- IPC分类号: G01J3/45
摘要:
A spectrometer arrangement for measuring a spectrum of a light beam emitted by a narrowband light source, such as a bandwidth-narrowed laser, includes at least one etalon, a beam splitter for splitting the light beam into a first partial beam and a second partial beam, one or more optical directing elements for directing the first partial beam n times and the second partial beam (n+k) times through the at least one etalon, wherein n and k are integers ≧1. The spectrometer arrangement further has at least one light-sensitive detector and an evaluation device for evaluating the spectra—recorded by the at least one detector—of the first partial beam that has passed through the at least one etalon n times and of the second partial beam that has passed through the at least one etalon (n+k) times in order to determine the light spectrum corrected for the apparatus function of the at least one etalon.
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