发明授权
- 专利标题: Lithographic apparatus and a method to compensate for the effect of disturbances on the projection system of a lithographic apparatus
- 专利标题(中): 平版印刷设备和补偿光刻设备投影系统上的干扰影响的方法
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申请号: US12616312申请日: 2009-11-11
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公开(公告)号: US08300208B2公开(公告)日: 2012-10-30
- 发明人: Erik Roelof Loopstra , Maurice Willem Jozef Etiënne Wijckmans , Robertus Leonardus Tousain , Adrianus Hendrik Koevoets
- 申请人: Erik Roelof Loopstra , Maurice Willem Jozef Etiënne Wijckmans , Robertus Leonardus Tousain , Adrianus Hendrik Koevoets
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- 主分类号: G03B27/42
- IPC分类号: G03B27/42 ; G03B27/58 ; G03B27/62
摘要:
Embodiments of the invention provide a lithographic apparatus including an illumination system configured to condition a radiation beam, a patterning device support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate table constructed to hold a substrate, a projection system configured to project the patterned radiation beam onto a target portion of the substrate, an active air mount to support the projection system, the active air mount including at least one actuator, and a feed-forward device, the feed-forward device being configured to provide on the basis of a set-point signal of a movable object, a feed-forward signal to the at least one actuator, wherein the feed-forward signal is designed to decrease a disturbance effect on the projection system due to movement of the movable object.
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